MEASUREMENT OF MULTI-LAYER STRUCTURES
    2.
    发明申请

    公开(公告)号:US20190254516A1

    公开(公告)日:2019-08-22

    申请号:US16398611

    申请日:2019-04-30

    Abstract: Systems and methods for assessing multi-layer structures in which a spectrum array is generated from low coherence interferometry and input into a statistical estimator, which determines the thickness and layer number based on the inputted spectrum and other information, including information about a source intensity noise, Poisson noise, and dark noise associated with the low coherence interferometry.

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