公开(公告)号：US11915901B2

公开(公告)日：2024-02-27

申请号：US18023545

申请日：2021-08-27

Applicant: ULVAC-PHI, INCORPORATED

Inventor： Scott R. Bryan ,  Gregory L. Fisher ,  David H. Narum ,  Ronald E. Negri

IPC: H01J37/02 ,  H01J37/28

CPC classification number: H01J37/026 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/2527

Abstract: Surface imaging apparatuses, surface analysis apparatuses, methods based on detection of secondary electrons or secondary ions that include a spatially scanned and DC or pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample; and dual polarity flood beams to effect neutralization of surface charge and surface potential variation.

公开(公告)号：US20230245848A1

公开(公告)日：2023-08-03

申请号：US18023545

申请日：2021-08-27

Applicant: ULVAC-PHI, INCORPORATED

Inventor： Scott R. Bryan ,  Gregory L. Fisher ,  David H. Narum ,  Ronald E. Negri

IPC: H01J37/02 ,  H01J37/28

CPC classification number: H01J37/026 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/2527

Abstract: Surface imaging apparatuses, surface analysis apparatuses, methods based on detection of secondary electrons or secondary ions that include a spatially scanned and DC or pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample; and dual polarity flood beams to effect neutralization of surface charge and surface potential variation.