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公开(公告)号：US20060232445A1
公开(公告)日：2006-10-19
申请号：US11450382
申请日：2006-06-12
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： H03M1/22
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
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2.发明申请公开(公告)号：US20080048118A1
公开(公告)日：2008-02-28
申请号：US11907375
申请日：2007-10-11
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： G01N23/00
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
摘要翻译： 提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。 电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料 桶和样品室的主体。 用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。 厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。
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3.发明授权公开(公告)号：US07435958B2
公开(公告)日：2008-10-14
申请号：US11356438
申请日：2006-02-17
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： H01J37/10
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
摘要翻译： 提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。 电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料 桶和样品室的主体。 用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。 厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。
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4.发明授权公开(公告)号：US07205550B2
公开(公告)日：2007-04-17
申请号：US11450382
申请日：2006-06-12
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： H03M1/22
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
摘要翻译： 提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。 电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料 桶和样品室的主体。 用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。 厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。
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5.发明授权公开(公告)号：US07566892B2
公开(公告)日：2009-07-28
申请号：US11907375
申请日：2007-10-11
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： G01N23/00
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
摘要翻译： 提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。 电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料 桶和样品室的主体。 用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。 厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。
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公开(公告)号：US20060219946A1
公开(公告)日：2006-10-05
申请号：US11356438
申请日：2006-02-17
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
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公开(公告)号：US07030376B2
公开(公告)日：2006-04-18
申请号：US10742901
申请日：2003-12-23
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： G01N23/00
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
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公开(公告)号：US20110032176A1
公开(公告)日：2011-02-10
申请号：US12907912
申请日：2010-10-19
申请人： Atsushi KOBARU , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi KOBARU , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
IPC分类号： G09G1/06
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。
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公开(公告)号：US20070159662A1
公开(公告)日：2007-07-12
申请号：US11713687
申请日：2007-03-05
申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
IPC分类号： H04N1/00
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
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公开(公告)号：US07187345B2
公开(公告)日：2007-03-06
申请号：US11298590
申请日：2005-12-12
申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。
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