公开(公告)号：US20130082038A1

公开(公告)日：2013-04-04

申请号：US13617046

申请日：2012-09-14

申请人： Toshiyuki YOSHIKAWA ,  Hironari OHKUBO ,  Noboru TAKEDA

发明人： Toshiyuki YOSHIKAWA ,  Hironari OHKUBO ,  Noboru TAKEDA

IPC分类号： B23K26/02

CPC分类号： B23K26/048 ,  B23K26/00 ,  B23K26/0006 ,  B23K26/40 ,  B23K2103/50 ,  B23K2103/56 ,  H01L21/30 ,  H01L21/304 ,  H01L21/3043 ,  H01L2221/00

摘要： A method of detecting a condensing spot position in a laser beam processing apparatus, including: a detection position setting step of setting a plurality of Z-axis directional positions in a range from a starting point to an ending point of detection positions into which the condenser is positioned; a laser beam processed groove forming step of sequentially positioning the condenser into the detection positions in the range from the starting point to the ending point, performing a predetermined interval indexing feeding by operating indexing feeding means each time the detection position for the condenser is changed, and forming a laser beam processed groove of a predetermined length in the plate-shaped body at each of the detection positions for the condenser; and a laser beam processed groove imaging step of imaging the laser beam processed grooves formed in the plate-shaped body by imaging means.

摘要翻译： 一种检测激光束处理装置中的聚光点位置的方法，包括：检测位置设定步骤，在从所述冷凝器的检测位置的起始点到终点的范围内设定多个Z轴方向位置 定位 激光束处理槽形成步骤，将冷凝器顺序地定位在从起点到终点的范围内的检测位置，每当改变冷凝器的检测位置时，通过操作分度输送装置执行预定的间隔分度进给， 以及在所述冷凝器的每个检测位置处，在所述板状体中形成预定长度的激光束处理槽; 以及激光束处理槽成像步骤，通过成像装置对形成在板状体中的激光束处理槽进行成像。