公开(公告)号：US08493057B2

公开(公告)日：2013-07-23

申请号：US12731483

申请日：2010-03-25

申请人： Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita ,  Eiji Kato ,  Kodo Kawase

发明人： Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita ,  Eiji Kato ,  Kodo Kawase

IPC分类号： G01S3/02

CPC分类号： G01J5/0285 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8806

摘要： A detector detects an electromagnetic wave having a frequency of 0.01 THz≦f≦100 THz and transmitted through a device under test (DUT). A changer changes a relative position of an intersection of an optical path of the electromagnetic wave and the DUT, with respect to the DUT. A deriver derives a characteristic value of the electromagnetic wave based on a detection result of the detector, while the characteristic value is associated with an assumed relative position, which is the relative position if the electromagnetic wave is not refracted by the DUT. A corrector changes the assumed relative position to an actual relative position, which is the relative position if the refraction of the electromagnetic wave by the DUT is considered. A corrected deriver derives the characteristic value associated with a predetermined relative position based on an output from the corrector.

摘要翻译： 检测器检测频率为0.01THz @ f @ 100THz的电磁波，并通过被测器件（DUT）传输。 变换器相对于DUT来改变电磁波和DUT的光路的交点的相对位置。 导出器基于检测器的检测结果导出电磁波的特征值，而特征值与假设的相对位置相关联，假设的相对位置是电磁波未被DUT折射的相对位置。 校正器将假设的相对位置改变为实际的相对位置，如果考虑到DUT的电磁波的折射，则相对位置是相对位置。 校正后的发生器基于校正器的输出导出与预定相对位置相关联的特征值。

公开(公告)号：US20050052638A1

公开(公告)日：2005-03-10

申请号：US10491787

申请日：2002-10-09

申请人： Takeshi Ozeki ,  Tomoyu Yamashita ,  Motoki Imamura

发明人： Takeshi Ozeki ,  Tomoyu Yamashita ,  Motoki Imamura

IPC分类号： G01M11/02 ,  G01M11/00 ,  G01J4/00

CPC分类号： G01M11/333 ,  G01M11/336

摘要： A polarization mode dispersion measuring device reduced in time required to measure polarization mode dispersion τPMD. A polarization controller (12) allows a first (second) incident light to apply a synthetic incident light to an object to be measured (30) in line with a p-polarization axis (s-polarization axis) in a polarization separator (16). Accordingly, the phase shift equivalent value (optical angle frequency differentiation) and amplitude equivalent value (square value) of a first incident light component (second incident light component) in an output from the polarization separator (16) measured by a first measuring unit (20a) (second measuring unit (20b)) are respectively the phase shift equivalent value and amplitude equivalent value of a first column T11, T21 (second column T12, T22) when the transfer function matrix of the object to be measured (30) is a 2×2 matrix to thereby allow a control unit (2) to determine the polarization mode dispersion r PMD of the object to be measured (30). Since there is no need of switching the orientation setting of light output from the polarization controller (12) with the setting left fixed, time required to measure polarization mode dispersion τPMD can be shortened.

摘要翻译： 偏振模色散测量装置减少测量偏振模色散τPMD所需的时间。 偏振控制器（12）允许第一（第二）入射光根据偏振分离器（16）中的p偏振轴（s偏振轴）将合成入射光施加到待测量对象（30） 。 因此，由第一测量单元测量的偏振分离器（16）的输出中的第一入射光分量（第二入射光分量）的相移等效值（光学角度频率微分）和振幅等效值（平方值） 20a）（第二测量单元（20b））分别是当被测量对象（30）的传递函数矩阵为（30）时的第一列T11，T21（第二列T12，T22）的相移等效值和振幅当量值 2×2矩阵，从而允许控制单元（2）确定被测量物体的偏振模色散r PMD（30）。 由于不需要将固定的偏振控制器（12）的光的输出的取向设置切换，所以可以缩短测量偏振模色散τPMD所需的时间。

公开(公告)号：US08481938B2

公开(公告)日：2013-07-09

申请号：US12731617

申请日：2010-03-25

申请人： Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita ,  Eiji Kato

发明人： Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita ,  Eiji Kato

IPC分类号： G01J3/00 ,  G01J9/00

CPC分类号： G01N21/3581 ,  G01N21/3563

摘要： According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device, an electromagnetic wave detector, a relative position changing unit, a delay period recording unit, a phase deriving unit, a delay-corrected phase deriving unit, a sinogram deriving unit, and an image deriving unit. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test and a container storing at least a part of the device under test.

摘要翻译： 根据本发明，电磁波测量装置包括电磁波输出装置，电磁波检测器，相对位置改变单元，延迟周期记录单元，相位导出单元，延迟校正相位导出单元，正弦图 导出单元和图像导出单元。 电磁波输出装置向被测设备输出频率等于或大于0.01THz且等于或小于100THz的电磁波，以及容纳至少部分被测器件的容器。

公开(公告)号：US08183528B2

公开(公告)日：2012-05-22

申请号：US12487177

申请日：2009-06-18

申请人： Eiji Kato ,  Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita

发明人： Eiji Kato ,  Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita

IPC分类号： G01R23/16

CPC分类号： G01N21/3581

摘要： According to the present invention, the CT is carried out based on parameters other than the absorption rate. An electromagnetic wave measurement device includes an electromagnetic wave output device 2 which outputs an electromagnetic wave at a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test 1, an electromagnetic wave detector 4 which detects the electromagnetic wave which has transmitted through the device under test 1, a relative position changing unit 6 which changes a relative position of an intersection 100 at which an optical path of the electromagnetic wave transmitting through the device under test 1 and the device under test 1 intersect with respect to the device under test 1, a phase deriving unit 12 which derives, based on a detected result by the electromagnetic wave detector 4, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test 1, a sinogram deriving unit 16 which derives a sinogram based on a derived result by the phase deriving unit 12, and a cross sectional image deriving unit 18 that derives, based on the sinogram, an image of a cross section of the device under test 1 including a trajectory of the intersection 100.

摘要翻译： 根据本发明，根据吸收速度以外的参数进行CT。 电磁波测量装置包括电磁波输出装置2，其以等于或大于0.01 [THz]且等于或小于100 [THz]的频率朝向被测设备1输出电磁波，电磁波检测器 4，其检测通过被测试装置1发送的电磁波;相对位置改变单元6，其改变通过被测试设备1发送的电磁波的光路和设备的相交位置100的相对位置; 测试1相对于被测设备1相交，相位导出单元12基于电磁波检测器4的检测结果，导出已经通过设备传输的电磁波的频域中的相位 测试1，基于相位导出单元12的导出结果导出正弦图的正弦图导出单元16，以及横截面ima ge导出单元18基于正弦图得出包括交会100的轨迹的被测设备1的横截面的图像。

公开(公告)号：US08279438B2

公开(公告)日：2012-10-02

申请号：US12480042

申请日：2009-06-08

申请人： Tomoyu Yamashita ,  Motoki Imamura

发明人： Tomoyu Yamashita ,  Motoki Imamura

IPC分类号： G01J3/40

CPC分类号： G01N21/3581 ,  G01J3/42 ,  G01J11/00

摘要： An object is to enable a change in a frequency for which an electric signal based on an optical signal is measured by a spectrum analyzer. An optical measurement device includes a first photoconductive switch that receives predetermined pulse light from a first laser light source, and outputs terahertz light having the same repetition frequency as the repetition frequency of the predetermined pulse light. The optical measurement device also includes a second photoconductive switch that receives the terahertz light and a sampling light pulse, and outputs a signal corresponding to a power of the terahertz light at a time point when the sampling light pulse is received. The optical measurement device further includes an RF spectrum analyzer that measures a magnitude of the signal corresponding to a measured frequency that changes over time, an optical coupler that outputs a simultaneous light pulse when the predetermined pulse light and the sampling light pulse are simultaneously input, a photo detector that converts the simultaneous light pulse into an electric signal as a trigger signal, and an optical delay circuit that delays the trigger signal.

摘要翻译： 本发明的目的是能够通过频谱分析仪来测量基于光信号的电信号的频率的变化。 光学测量装置包括第一光电开关，其接收来自第一激光光源的预定脉冲光，并输出具有与预定脉冲光的重复频率相同的重复频率的太赫兹光。 光学测量装置还包括接收太赫兹光和采样光脉冲的第二光电开关，并且在接收采样光脉冲的时间点输出对应于太赫兹光的功率的信号。 光学测量装置还包括RF频谱分析仪，其测量对应于随时间变化的测量频率的信号的幅度;当预定脉冲光和采样光脉冲被同时输入时输出同时的光脉冲的光耦合器; 将同步光脉冲转换成电信号作为触发信号的光检测器，以及延迟触发信号的光延迟电路。

公开(公告)号：US07006207B2

公开(公告)日：2006-02-28

申请号：US10491787

申请日：2002-10-09

申请人： Takeshi Ozeki ,  Tomoyu Yamashita ,  Motoki Imamura

发明人： Takeshi Ozeki ,  Tomoyu Yamashita ,  Motoki Imamura

IPC分类号： G01N21/00

CPC分类号： G01M11/333 ,  G01M11/336

摘要： A device for measuring τPMD includes a polarization controller (12) that allows first (second) incident light, in a synthetic incident light to an object to be measured (30), to be in line with a p-polarization (s-polarization) axis in a polarization separator (16). The phase shift equivalent value (optical angle frequency differentiation) and amplitude equivalent value (square value) of a first (second) incident light component in an output from the polarization separator (16) measured by a first (second) measuring unit (20a, 20b) are respectively the phase shift equivalent value and amplitude equivalent value of a first column T11, T21 (second column T12, T22) when the transfer function matrix of the object (30) is a 2×2 matrix to thereby allow a control unit (2) to determine the polarization mode dispersion τPMD of the object (30).

摘要翻译： 用于测量tau PMD 的装置包括偏振控制器（12），该偏振控制器允许在与被测量物体（30）的合成入射光中的第一（第二）入射光符合 极化分离器（16）中的p偏振（s偏振）轴。 由第一（第二）测量单元（20a）测量的偏振分离器（16）的输出中的第一（第二）入射光分量的相移等效值（光学角度频率微分）和幅度等效值（平方值） ，20b）分别是第一列T 11，T 21（第二列T 12）的相移等效值和振幅当量值， ，当对象（30）的传递函数矩阵是2×2矩阵，从而允许控制单元（2）确定偏振模色散波形时， 的物体（30）。

公开(公告)号：US06654104B2

公开(公告)日：2003-11-25

申请号：US09975319

申请日：2001-10-12

申请人： Eiji Kimura ,  Motoki Imamura ,  Toshio Kawazawa

发明人： Eiji Kimura ,  Motoki Imamura ,  Toshio Kawazawa

IPC分类号： G01N2100

CPC分类号： G01M11/335 ,  G01M11/333 ,  G01M11/338

摘要： A technique for measuring optical characteristics includes providing a variable wavelength light source a fixed wavelength light source optical modulators for modulating the variable wavelength light and the fixed wavelength light, a fiber coupler for entering composite light generated by composing the variable wavelength light with the fixed wavelength light into a device under test, a circulator for extracting a variable wavelength light component from light transmitted through a fiber pair, and an optical filter for extracting a variable wavelength light component from the transmitted light, and measuring a phase difference of the variable wavelength light component with the fixed wavelength light component as a reference.

摘要翻译： 一种用于测量光学特性的技术包括：提供可变波长光源用于调制可变波长光和固定波长光的固定波长光源光调制器，用于输入通过组合具有固定波长的可变波长光产生的复合光的光纤耦合器 照射到被测器件中，用于从透过光纤对的光中提取可变波长光成分的循环器，以及用于从透射光中提取可变波长光成分的滤光器，并测量可变波长光的相位差 固定波长光分量作为参考。

公开(公告)号：US08969807B2

公开(公告)日：2015-03-03

申请号：US13679081

申请日：2012-11-16

申请人： Motoki Imamura ,  Shigeki Nishina

发明人： Motoki Imamura ,  Shigeki Nishina

IPC分类号： G01J5/02 ,  G01N21/17 ,  G01N21/3581 ,  G01N21/3504

CPC分类号： G01N21/17 ,  G01N21/3504 ,  G01N21/3581

摘要： A carrier includes attachment holes to which a catalyst attaches, and non-attachment holes to which the catalyst does not attach. An attachment quantity measurement device includes an electromagnetic wave output device that outputs a terahertz wave toward the carrier, an electromagnetic wave detector that detects the terahertz wave which has transmitted through the carrier, a reference value obtainer that obtains, based on a result detected by the electromagnetic wave detector, any one of an absorption rate, a group delay, and a dispersion of the terahertz wave in the non-attachment holes, and an attachment quantity obtainer that obtains, based on the result detected by the electromagnetic wave detector and the result obtained by the reference value obtainer, a weight or a density of the catalyst present in the attachment holes.

摘要翻译： 载体包括催化剂附着的附着孔和催化剂不附着的不附着孔。 安装量测量装置包括向载体输出太赫兹波的电磁波输出装置，检测通过载波传输的太赫兹波的电磁波检测器，基于由该载波检测到的结果获得的参考值获取器 电磁波检测器，非附着孔中的太赫兹波的吸收率，群延迟和色散中的任一种，以及基于由电磁波检测器检测出的结果和结果获得的安装量获取器 通过参考值获得器获得，存在于附接孔中的催化剂的重量或密度。

公开(公告)号：US08053733B2

公开(公告)日：2011-11-08

申请号：US12616992

申请日：2009-11-12

申请人： Shigeki Nishina ,  Motoki Imamura

发明人： Shigeki Nishina ,  Motoki Imamura

IPC分类号： G01J5/02

CPC分类号： G01N21/3581

摘要： A desired spatial resolution upon a measurement can be attained by making an electromagnetic wave including a terahertz wave (frequency thereof is equal to or more than 0.01 [THz], and equal to or less than 100 [THz]) incident to a device under test. An electromagnetic wave measurement device includes an incident lens which makes an electromagnetic wave to be measured having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] incident to a device under a test while decreasing a beam diameter of the electromagnetic wave to be measured, a scanning stage which rotates, about a line orthogonal to an optical axis of the incident lens as a rotational axis, the device under the test or the optical axis, and an electromagnetic wave detector which detects the electromagnetic wave to be measured which has transmitted through the device under the test, where a coordinate on the optical axis of a position which gives the minimum value d of the beam diameter is different from a coordinate on the optical axis of the rotational axis.

摘要翻译： 测量时的期望空间分辨率可以通过使包含入射到被测器件的太赫兹波（其频率等于或大于0.01 [THz]，等于或小于100 [THz]）的电磁波来实现 。 电磁波测量装置包括入射透镜，该入射透镜使得测量的电磁波具有等于或大于在测试时入射到设备的0.01 [THz]且等于或小于100 [THz]的频率，同时减小光束 要测量的电磁波的直径，围绕与入射透镜的光轴正交的线作为旋转轴旋转的扫描台，被测装置或光轴的电磁波检测器，以及检测 通过测试中的装置传输的要测量的电磁波，其中给出光束直径的最小值d的位置的光轴上的坐标不同于旋转轴的光轴上的坐标。

公开(公告)号：US06433865B1

公开(公告)日：2002-08-13

申请号：US09975557

申请日：2001-10-12

申请人： Eiji Kimura ,  Motoki Imamura ,  Toshio Kawazawa ,  Satoru Nagumo

发明人： Eiji Kimura ,  Motoki Imamura ,  Toshio Kawazawa ,  Satoru Nagumo

IPC分类号： G01N2100

CPC分类号： G01M11/335 ,  G01M11/333 ,  G01M11/338

摘要： To provide an apparatus for measuring chromatic dispersion when modulating frequency of a variable wavelength light source is different from modulating frequency of a fixed wavelength light source for reference. This apparatus is provided with a variable wavelength light phase comparator 24 for obtaining a phase difference &phgr;x-&phgr;x′ between a variable wavelength light component and a signal having the first modulating frequency fmx, a fixed wavelength light phase comparator 25 for obtaining a phase difference between a phase difference &phgr;0-&phgr;0′ between a fixed wavelength light component and an electrical signal having the second modulating frequency fm0, a phase difference converter 26 for converting the phase difference &phgr;0-&phgr;0′ calculated by the fixed wavelength light phase comparator 25 into &phgr;ex, which corresponds to the first modulating frequency fmx, and a true phase difference calculator 27 for measuring a true phase difference &phgr; between the phase difference &phgr;x-&phgr;x′ calculated by the variable wavelength light phase comparator 24, and the converted result &phgr;ex of phase difference converter 26, and obtains the true phase difference &phgr; from which an affect of contraction/extension of a DUT 30 is removed when the first modulating frequency fmx and the second modulating frequency fm0 are different, thereby measuring wave dispersion.

摘要翻译： 提供一种用于测量可变波长光源的调制频率时的色散的装置与用于参考的固定波长光源的调制频率不同。该装置设置有可变波长光相位比较器24，用于获得相位差phix- 可变波长光分量和具有第一调制频率fmx的信号之间的“phix”，固定波长光相位比较器25，用于获得固定波长光分量与具有第一调制频率fmx的电信号之间的相位差phi0-phi0'之间的相位差 第二调制频率fm0，用于将由固定波长光相位比较器25计算出的相位差phi0-phi0'转换成对应于第一调制频率fmx的phiex的相位差转换器26和用于测量 相位差phix-phix'ca之间的真相位差phi 由可变波长光相位比较器24计算的相位差转换器26的转换结果phix，并获得当第一调制频率fmx和 第二调制频率fm0不同，从而测量波分散。