发明授权
- 专利标题: Electromagnetic wave measuring apparatus, measuring method, program, and recording medium
- 专利标题(中): 电磁波测量装置,测量方法,程序和记录介质
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申请号: US12731617申请日: 2010-03-25
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公开(公告)号: US08481938B2公开(公告)日: 2013-07-09
- 发明人: Shigeki Nishina , Motoki Imamura , Akiyoshi Irisawa , Tomoyu Yamashita , Eiji Kato
- 申请人: Shigeki Nishina , Motoki Imamura , Akiyoshi Irisawa , Tomoyu Yamashita , Eiji Kato
- 申请人地址: JP Tokyo
- 专利权人: Advantest Corporation
- 当前专利权人: Advantest Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2009-157146 20090701
- 主分类号: G01J3/00
- IPC分类号: G01J3/00 ; G01J9/00
摘要:
According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device, an electromagnetic wave detector, a relative position changing unit, a delay period recording unit, a phase deriving unit, a delay-corrected phase deriving unit, a sinogram deriving unit, and an image deriving unit. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test and a container storing at least a part of the device under test.
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