公开(公告)号：US20180095021A1

公开(公告)日：2018-04-05

申请号：US15719178

申请日：2017-09-28

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshihiko KIKUCHI ,  Nobuyuki NAGAYAMA ,  Hikaru KIKUCHI ,  Katsushi ABE

IPC: G01N15/10 ,  G01N33/00

Abstract: A particle collecting apparatus includes a cylindrical housing, a gap forming unit, a supply port and an intake port. The cylindrical housing has a closed top and an open bottom facing a target object. The gap forming unit is configured to form a gap having a predetermined distance between the bottom and the target object. The supply port is formed at the opening of the bottom in an annular shape along an inner wall of the housing and configured to supply a gas to the target object. The intake port is provided closer to a central axis of the supply port than the supply port and configured to suck particles on the target object.

公开(公告)号：US20190279894A1

公开(公告)日：2019-09-12

申请号：US16293788

申请日：2019-03-06

Applicant: Tokyo Electron Limited

Inventor： Yohei UCHIDA ,  Naoki SUGAWA ,  Katsushi ABE ,  Tsuyoshi HIDA

IPC: H01L21/687 ,  H01L21/67 ,  H01J37/32

Abstract: A placement apparatus for placing a workpiece is provided. The placement apparatus includes a stage on which a workpiece can be placed in a processing vessel; an edge ring including a locking part which is disposed on the stage so as to surround a periphery of the workpiece; a conductive connecting member connected with the edge ring at the locking part; and a first contacting member configured to cause the edge ring to contact the stage, while the edge ring is connected with the connecting member.

公开(公告)号：US20220336257A1

公开(公告)日：2022-10-20

申请号：US17811121

申请日：2022-07-07

Applicant: Tokyo Electron Limited

Inventor： Yohei UCHIDA ,  Naoki SUGAWA ,  Katsushi ABE ,  Tsuyoshi HIDA

IPC: H01L21/687 ,  H01J37/32 ,  H01L21/67 ,  H01L21/683

Abstract: A placement apparatus for placing a workpiece is provided. The placement apparatus includes a stage on which a workpiece can be placed in a processing vessel; an edge ring including a locking part which is disposed on the stage so as to surround a periphery of the workpiece; a conductive connecting member connected with the edge ring at the locking part; and a first contacting member configured to cause the edge ring to contact the stage, while the edge ring is connected with the connecting member.