公开(公告)号：US20060219919A1

公开(公告)日：2006-10-05

申请号：US11433850

申请日：2006-05-12

Applicant: Thomas Moore ,  Gonzalo Amador ,  Lyudmila Zaykova-Feldman

Inventor： Thomas Moore ,  Gonzalo Amador ,  Lyudmila Zaykova-Feldman

IPC: G21K7/00 ,  G01N23/00

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N23/2204 ,  H01J37/26 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.

Abstract translation: TEM样品保持器由至少一个纳米机械手探针尖端和TEM样品架预成型件形成。 探针尖端永久地连接到TEM样品架预成型件上，以在将样品连接到FIB内的探针尖端之前创建TEM样品架。 在优选实施例中，通过向预成型件和探针针尖施加压力，将探头尖端连接到TEM样品架预成型件上，以便使预成型材料围绕探针尖端塑性流动。 TEM样品架可能具有比TEM样品架预制件更小的尺寸; 在这种情况下，TEM样品架从较大的TEM样品保持器预成型切割，优选地在与附接探针尖端相同的操作中。

公开(公告)号：US20080258056A1

公开(公告)日：2008-10-23

申请号：US12041217

申请日：2008-03-03

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

Abstract translation: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

公开(公告)号：US20110031397A1

公开(公告)日：2011-02-10

申请号：US12896281

申请日：2010-10-01

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: H01J37/28

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

公开(公告)号：US08247768B2

公开(公告)日：2012-08-21

申请号：US12896281

申请日：2010-10-01

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

Abstract translation: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的投影之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

公开(公告)号：US07935937B2

公开(公告)日：2011-05-03

申请号：US12391552

申请日：2009-02-24

Applicant: Thomas M. Moore ,  Gonzalo Amador ,  Lyudmila Zaykova-Feldman

Inventor： Thomas M. Moore ,  Gonzalo Amador ,  Lyudmila Zaykova-Feldman

IPC: G01N23/00 ,  G01F23/00

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N23/2204 ,  H01J37/26 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.

Abstract translation: TEM样品保持器由至少一个纳米机械手探针尖端和TEM样品架预成型件形成。 在将样品连接到FIB内的探针尖端的位置之前，探针尖端永久地附着到TEM样品架预成型件上以形成TEM样品架。 在优选实施例中，通过向预成型件和探针针尖施加压力，将探头尖端连接到TEM样品架预成型件上，以便使预成型材料围绕探针尖端塑性流动。 TEM样品架可能具有比TEM样品架预制件更小的尺寸; 在这种情况下，TEM样品架从较大的TEM样品保持器预成型切割，优选地在与附接探针尖端相同的操作中。

公开(公告)号：US20110017927A1

公开(公告)日：2011-01-27

申请号：US12842105

申请日：2010-07-23

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador

IPC: H01J37/22 ,  H01J37/305 ,  H01J37/20

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/304 ,  H01J2237/20207 ,  H01J2237/2482 ,  H01J2237/30466 ,  H01J2237/31745

Abstract: An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling of the specimen.

Abstract translation: 用于监测带电粒子仪器中的样品研磨的装置具有附接到仪器倾斜台（120）的可变倾斜试样保持器（130）。 可变倾斜试样架（130）包括第一枢转板（260），其具有用于保持可旋转地支撑在可变倾斜试样保持器（130）中的试样（290）的狭槽（280）。 第一枢转板（260）具有足够的旋转范围，以便将倾斜台（120）放置在其最大倾斜范围内的第一位置移动样本（290）的优选稀疏轴线， 样品（290）的薄化的优选轴线和仪器的离子束柱（110）的轴线大于零，到第二位置，其中样品（290）的薄化优选轴线基本上平行于 离子束柱（110）的轴线。 光检测器（250）被定位成通过离子束铣削来遮蔽通过样品（290）的光线。 通过样品（290）的光的强度可以与先前研磨阶段记录的强度进行比较，以确定样品研磨的终点。

公开(公告)号：US07834315B2

公开(公告)日：2010-11-16

申请号：US12041217

申请日：2008-03-03

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

Abstract translation: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

公开(公告)号：US08227781B2

公开(公告)日：2012-07-24

申请号：US12842105

申请日：2010-07-23

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador

IPC: G01N21/86

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/304 ,  H01J2237/20207 ,  H01J2237/2482 ,  H01J2237/30466 ,  H01J2237/31745

Abstract: An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder attached to the instrument tilt stage. The variable-tilt specimen holder includes a first pivoting plate having a slot for holding a specimen rotatably supported in the specimen holder. The first pivoting plate has a range of rotation sufficient to move the axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column of the instrument is greater than zero, to a second position where the axis for thinning of the specimen is substantially parallel to the axis of the ion-beam column. A light detector intercepts light passing through the specimen as it is thinned to determine an endpoint for milling of the specimen.

Abstract translation: 用于监测带电粒子仪器中的样品研磨的装置具有连接到仪器倾斜台上的可变倾斜的样品支架。 可变倾斜试样架包括第一枢转板，其具有用于保持可旋转地支撑在试样保持器中的试样的狭槽。 第一枢转板具有足够的旋转范围，以使样品的变薄轴从第一位置移动，其中倾斜台被放置在其最大倾斜范围内，并且样品的优选减薄轴线与轴线之间的角度 的仪器的离子束柱大于零，到第二位置，其中用于使样品变薄的轴线基本上平行于离子束柱的轴线。 光检测器在被稀释时拦截通过样品的光，以确定试样的铣削终点。

公开(公告)号：US08168949B2

公开(公告)日：2012-05-01

申请号：US12896274

申请日：2010-10-01

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

公开(公告)号：US20110031396A1

公开(公告)日：2011-02-10

申请号：US12896274

申请日：2010-10-01

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

Abstract translation: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。