公开(公告)号：US20120270154A1

公开(公告)日：2012-10-25

申请号：US13447796

申请日：2012-04-16

Applicant: Tatsuro MASUYAMA ,  Koji ICHIKAWA

Inventor： Tatsuro MASUYAMA ,  Koji ICHIKAWA

IPC: C08F236/20 ,  G03F7/20 ,  G03F7/004

CPC classification number: G03F7/2041 ,  G03F7/0046 ,  G03F7/0397

Abstract: The present invention provides a resin comprising a structural unit derived from a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, A2 represents a divalent fluorine-containing C1-C12 hydrocarbon group, and A1 represents a group represented by the formula (a-g1): A10-X10sA11-  (a-g1) wherein A10 is independently in each occurrence a C1-C5 aliphatic hydrocarbon group, A11 represents a C1-C5 aliphatic hydrocarbon group, X10 is independently in each occurrence —O—, —CO—, —CO—O— or —O—CO—, and s represents an integer of 0 to 2, and a photoresist composition comprising the resin and an acid generator.

Abstract translation: 本发明提供包含由式（I）表示的化合物衍生的结构单元的树脂：其中R1表示氢原子或甲基，A2表示二价含氟C1-C12烃基，A1表示 由式（a-g1）表示的基团：A10-X10数组A11-（a-g1）其中A10在每次出现时独立地为C1-C5脂族烃基，A11表示C1-C5脂族烃基，X10为 各自独立地为-O - ， - CO - ， - CO-O-或-O-CO-，s为0〜2的整数，以及包含该树脂和酸发生剂的光致抗蚀剂组合物。

公开(公告)号：US20120052443A1

公开(公告)日：2012-03-01

申请号：US13221597

申请日：2011-08-30

Applicant: Tatsuro MASUYAMA ,  Satoshi YAMAMOTO ,  Koji ICHIKAWA

Inventor： Tatsuro MASUYAMA ,  Satoshi YAMAMOTO ,  Koji ICHIKAWA

IPC: G03F7/20 ,  G03F7/004

CPC classification number: G03F7/0392 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2041 ,  G03F7/30 ,  G03F7/38 ,  Y10S430/111 ,  Y10S430/126

Abstract: A resist composition contains; a resin having a structural unit derived from a compound represented by the formula (a); and an acid generator. wherein R1 represents a hydrogen atom or a methyl group; R2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; A1 represents an optionally substituted C1 to C6 alkanediyl group or a group represented by the formula (a-g1); wherein s represents 0 or 1; A10 and A12 independently represent an optionally substituted C1 to C5 aliphatic hydrocarbon group; A11 represents a single bond or an optionally substituted C1 to C5 aliphatic hydrocarbon group; X10 and X11 independently represents an oxygen atom, a carbonyl group, a carbonyloxy group or an oxycarbonyl group; provided that a total number of the carbon atom of A10, A11, A12, X10 and X11 is 6 or less.

Abstract translation: 抗蚀剂组合物含有 具有衍生自由式（a）表示的化合物的结构单元的树脂; 和酸发生剂。 其中R1表示氢原子或甲基; R2代表任选取代的C1至C18脂族烃基; A1表示任意取代的C1〜C6烷二基或式（a-g1）表示的基团。 其中s表示0或1; A10和A12独立地表示任选取代的C1至C5脂族烃基; A11表示单键或任选取代的C1至C5脂族烃基; X 10和X 11独立地表示氧原子，羰基，羰氧基或氧羰基; A10，A11，A12，X10和X11的碳原子总数为6以下。

公开(公告)号：US20130022921A1

公开(公告)日：2013-01-24

申请号：US13552242

申请日：2012-07-18

Applicant: Koji ICHIKAWA ,  Tatsuro MASUYAMA ,  Satoshi YAMAGUCHI

Inventor： Koji ICHIKAWA ,  Tatsuro MASUYAMA ,  Satoshi YAMAGUCHI

IPC: G03F7/027 ,  G03F7/20

CPC classification number: G03F7/0046 ,  G03F7/0045 ,  G03F7/0397 ,  G03F7/2041

Abstract: A resist composition having; a resin having a structural unit represented by the formula (I), a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid and not including the structural unit represented by the formula (I), an acid generator, and a salt having an anion represented by the formula (IA). wherein R1, A1, A13, X12, A14, R1A and R2A are defined in the specification.

Abstract translation: 一种抗蚀剂组合物，具有： 具有由式（I）表示的结构单元的树脂，树脂在碱性水溶液中不溶或难溶，但是通过酸的作用而溶解在碱性水溶液中，不包括由式 （I），酸产生剂和具有由式（IA）表示的阴离子的盐。 其中R1，A1，A13，X12，A14，R1A和R2A在说明书中定义。

公开(公告)号：US20120219909A1

公开(公告)日：2012-08-30

申请号：US13404871

申请日：2012-02-24

Applicant: Koji ICHIKAWA ,  Tatsuro MASUYAMA ,  Satoshi YAMAGUCHI

Inventor： Koji ICHIKAWA ,  Tatsuro MASUYAMA ,  Satoshi YAMAGUCHI

IPC: G03F7/20 ,  G03F7/027

CPC classification number: G03F7/0045 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397 ,  G03F7/11 ,  G03F7/2041 ,  G03F7/30 ,  G03F7/38 ,  Y10S430/108 ,  Y10S430/111

Abstract: A resist composition containing; (A1) a resin having a structural unit represented by the formula (I), (A2) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid, (B) an acid generator, and (D) a salt having an anion represented by the formula (IA), wherein R1, A1, R2, R1A and R2A are defined in the specification.

Abstract translation: 含有抗蚀剂组合物 （A1）具有由式（I）表示的结构单元的树脂，（A2）在碱性水溶液中不溶或难溶的树脂，但是通过酸作用而溶于碱性水溶液中的树脂，（B） 酸衍生物，和（D）具有由式（IA）表示的阴离子的盐，其中R1，A1，R2，R1A和R2A在说明书中定义。

公开(公告)号：US20120264059A1

公开(公告)日：2012-10-18

申请号：US13441205

申请日：2012-04-06

Applicant: Koji ICHIKAWA ,  Takahiro YASUE ,  Tatsuro MASUYAMA

Inventor： Koji ICHIKAWA ,  Takahiro YASUE ,  Tatsuro MASUYAMA

IPC: G03F7/027 ,  G03F7/20

CPC classification number: G03F7/0046 ,  G03F7/0045 ,  G03F7/027 ,  G03F7/0397 ,  G03F7/20 ,  G03F7/2041

Abstract: A resist composition includes (A) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid, (B) an acid generator having a structure to be cleaved by the action of an alkaline developer, and (C) a compound represented by the formula (I), wherein R1 and R2 in each occurrence independently represent a C1 to C12 hydrocarbon group, a C1 to C6 alkoxyl group, a C2 to C7 acyl group, a C2 to C7 acyloxy group, a C2 to C7 alkoxycarbonyl group, a nitro group or a halogen atom; m and n independently represent an integer of 0 to 4.

Abstract translation: 抗蚀剂组合物包括（A）在碱性水溶液中不溶或难溶的树脂，但是通过酸的作用可溶于碱性水溶液中，（B）具有要通过 碱性显影剂，和（C）由式（I）表示的化合物，其中R1和R2各自独立地表示C1〜C12烃基，C1〜C6烷氧基，C2〜C7酰基，C2 C7酰氧基，C2〜C7烷氧基羰基，硝基或卤素原子; m和n独立地表示0〜4的整数。

公开(公告)号：US20120100483A1

公开(公告)日：2012-04-26

申请号：US13281145

申请日：2011-10-25

Applicant: Tatsuro MASUYAMA ,  Satoshi YAMAMOTO ,  Koji ICHIKAWA

Inventor： Tatsuro MASUYAMA ,  Satoshi YAMAMOTO ,  Koji ICHIKAWA

IPC: G03F7/20 ,  G03F7/027 ,  G03F7/004

CPC classification number: G03F7/0046 ,  G03F7/0045 ,  G03F7/0397 ,  G03F7/2041

Abstract: A resist composition contains; a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C24 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.

Abstract translation: 抗蚀剂组合物含有 具有由式（aa）表示的结构单元的树脂和由式（ab）表示的结构单元; 和酸产生剂，其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键，任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C24脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。

公开(公告)号：US20120100482A1

公开(公告)日：2012-04-26

申请号：US13280969

申请日：2011-10-25

Applicant: Tatsuro MASUYAMA ,  Satoshi YAMAMOTO ,  Koji ICHIKAWA

Inventor： Tatsuro MASUYAMA ,  Satoshi YAMAMOTO ,  Koji ICHIKAWA

IPC: G03F7/20 ,  G03F7/027 ,  G03F7/004

CPC classification number: G03F7/2041 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397

Abstract: A resist composition contains a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.

Abstract translation: 抗蚀剂组合物含有具有由式（aa）表示的结构单元的树脂和由式（ab）表示的结构单元; 和酸产生剂，其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键，任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C36脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。

公开(公告)号：US20130040237A1

公开(公告)日：2013-02-14

申请号：US13569787

申请日：2012-08-08

Applicant: Tatsuro MASUYAMA ,  Yuichi MUKAI

Inventor： Tatsuro MASUYAMA ,  Yuichi MUKAI

IPC: C07C69/675 ,  G03F7/20 ,  G03F7/004

CPC classification number: C07C381/12 ,  C07C309/08 ,  C07C309/17 ,  C07C2603/74 ,  G03F7/0045 ,  G03F7/20

Abstract: A photoresist composition which comprises a salt represented by formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1, R2 and R3 each independently represent a hydrogen atom or a C1-C10 monovalent aliphatic saturated hydrocarbon group, X1 and X2 each independently represent a single bond, a carbonyl group, or a C1-C10 divalent aliphatic saturated hydrocarbon group where a hydrogen atom can be replaced by a hydroxy group and where a methylene group can be replaced by an oxygen atom, a sulfonyl group or a carbonyl group, A1 represents a C1-C30 organic group, m1 represents an integer of 1 to 4, and Z+ represents an organic cation, and a resin which is hardly soluble or insoluble but soluble in an aqueous alkali solution by action of an acid.

Abstract translation: 一种光致抗蚀剂组合物，其包含式（I）表示的盐：其中Q1和Q2各自独立地表示氟原子或C1-C6全氟烷基，R1，R2和R3各自独立地表示氢原子或C1-C10一价脂族 饱和烃基，X 1和X 2各自独立地表示单键，羰基或C 1 -C 10二价脂族饱和烃基，其中氢原子可以被羟基代替，并且其中亚甲基可被氧代替 原子，磺酰基或羰基，A1表示C1-C30有机基团，m1表示1〜4的整数，Z +表示有机阳离子，难溶于或不溶而溶于碱水溶液的树脂 溶液通过酸的作用。

公开(公告)号：US20120315580A1

公开(公告)日：2012-12-13

申请号：US13491370

申请日：2012-06-07

Applicant: Tatsuro MASUYAMA ,  Yuichi MUKAI

Inventor： Tatsuro MASUYAMA ,  Yuichi MUKAI

IPC: C07C381/12 ,  G03F7/20 ,  C07D321/10 ,  G03F7/027

CPC classification number: C07D321/10 ,  C07C309/10 ,  C07C309/12 ,  C07C381/12 ,  C07C2601/14 ,  C07C2603/74 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/11 ,  G03F7/2041

Abstract: A salt represented by formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, A1 represents a C1-C30 monovalent organic group, X1 represents a C1-C10 aliphatic hydrocarbon group where a hydrogen atom may be replaced by a hydroxy group, m1 and m2 independently each represent an integer of 1 to 4, and Z+ represents an organic cation.

Abstract translation: 由式（I）表示的盐：其中Q1和Q2各自独立地表示氟原子或C1-C6全氟烷基，A1表示C1-C30一价有机基团，X1表示C1-C10脂族烃基，其中氢原子 可以被羟基取代，m1和m2独立地表示1〜4的整数，Z +表示有机阳离子。

公开(公告)号：US20110091807A1

公开(公告)日：2011-04-21

申请号：US12903146

申请日：2010-10-12

Applicant: Tatsuro MASUYAMA ,  Kazuhiko HASHIMOTO ,  Junji SHIGEMATSU

Inventor： Tatsuro MASUYAMA ,  Kazuhiko HASHIMOTO ,  Junji SHIGEMATSU

IPC: G03F7/004 ,  C07C69/527 ,  G03F7/20 ,  C07C69/34 ,  C07C309/70 ,  C08F120/34

CPC classification number: C08F120/34 ,  C07C251/66 ,  C07C309/70 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2041

Abstract: The present invention provides a photoresist composition comprising a polymer comprising a structural unit derived from a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, R2 represents a C6-C12 aromatic hydrocarbon group which can have one or more substituents, R3 represents a cyano group or a C1-C12 hydrocarbon group which can have one or more substituents and which can contain one or more heteroatoms, A1 represents a single bond, —(CH2)g—CO—O—* or —(CH2)h—O—CO—(CH2)i—CO—O—* wherein g, h and i each independently represent an integer of −1 to 6 and * represents a binding position to the nitrogen atom, a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, and an acid generator.

Abstract translation: 本发明提供一种光致抗蚀剂组合物，其包含含有衍生自由式（I）表示的化合物的结构单元的聚合物：其中R 1表示氢原子或甲基，R 2表示可以具有1个的C 6 -C 12芳族烃基 或更多取代基，R 3表示可以具有一个或多个取代基并且可以含有一个或多个杂原子的氰基或C 1 -C 12烃基，A 1表示单键， - （CH 2）g -CO-O- *或 - （CH 2）h -O-CO-（CH 2）i-CO-O- *其中g，h和i各自独立地表示-1至6的整数，*表示与氮原子的结合位置， 酸不稳定基团，并且在碱性水溶液中不溶或难溶，但是通过酸和酸产生剂可溶于碱水溶液中。