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公开(公告)号：US20240361609A1
公开(公告)日：2024-10-31
申请号：US18770562
申请日：2024-07-11
发明人： Hsin-Yu CHEN , Chun-Peng LI , Chia-Chun HUNG , Ching-Hsiang HU , Wei-Ding WU , Jui-Chun WENG , Ji-Hong CHIANG , Yen Chiang LIU , Jiun-Jie CHIOU , Li-Yang TU , Jia-Syuan LI , You-Cheng JHANG , Shin-Hua CHEN , Lavanya SANAGAVARAPU , Han-Zong PAN , Hsi-Cheng HSU
IPC分类号： G02B27/30 , H01L27/146 , H01L31/0232
CPC分类号： G02B27/30 , H01L27/14625 , H01L31/02325
摘要： Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1×1019 per cubic centimeter (cm−3) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.
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公开(公告)号：US20230400699A1
公开(公告)日：2023-12-14
申请号：US18231760
申请日：2023-08-08
发明人： Hsin-Yu CHEN , Yen-Chiang LIU , June-Jie CHIOU , Jia-Syuan LI , You-Cheng JHANG , Shin-Hua CHEN , LAVANYA SANAGAVARAPU , Han-Zong PAN , Chun-Peng LI , Chia-Chun HUNG , Ching-Hsiang HU , Wei-Ding WU , Jui-Chun WENG , Ji-Hong CHIANG , Hsi-Cheng HSU
IPC分类号： G02B27/30 , G02B5/20 , G02B26/00 , H01L27/146 , H01L31/0216 , G06V40/13
CPC分类号： G02B27/30 , G02B5/20 , G02B26/007 , H01L27/14625 , H01L31/02162 , H01L27/1462 , G06V40/1312 , B32B2551/00 , G06V40/1318
摘要： Disclosed is a cost-effective method to fabricate a multifunctional collimator structure for contact image sensors to filter ambient infrared light to reduce noises. In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; a plurality of via holes; and a conductive layer, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, and wherein the conductive layer is formed over at least one of the following: the first surface of the first dielectric layer and a portion of sidewalls of each of the plurality of via holes, and wherein the conductive layer is configured so as to allow the optical collimator to filter light in a range of wavelengths.
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公开(公告)号：US20220373815A1
公开(公告)日：2022-11-24
申请号：US17881439
申请日：2022-08-04
发明人： Hsin-Yu CHEN , Chun-Peng LI , Chia-Chun HUNG , Ching-Hsiang HU , Wei-Ding WU , Jui-Chun WENG , Ji-Hong CHIANG , Yen-Chiang LIU , Jiun-Jie CHIOU , Li-Yang TU , Jia-Syuan LI , You-Cheng JHANG , Shin-Hua CHEN , Lavanya SANAGAVARAPU , Han-Zong PAN , Hsi-Cheng HSU
IPC分类号： G02B27/30 , H01L31/0232 , H01L27/146
摘要： Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1×1019 per cubic centimeter (cm−3) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.
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公开(公告)号：US20230359056A1
公开(公告)日：2023-11-09
申请号：US18222344
申请日：2023-07-14
发明人： Hsin-Yu CHEN , Chun-Peng LI , Chia-Chun HUNG , Ching-Hsiang HU , Wei-Ding WU , Jui-Chun WENG , JI-Hong CHIANG , Yen-Chiang LIU , Jiun-Jie CHIOU , Li-Yang TU , Jia-Syuan LI , You-Cheng JHANG , Shin-Hua CHEN , Lavanya SANAGAVARAPU , Han-Zong PAN , Hsi-Cheng HSU
IPC分类号： G02B27/30 , H01L31/0232 , H01L27/146
CPC分类号： G02B27/30 , H01L31/02325 , H01L27/14625
摘要： Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1×1019 per cubic centimeter (cm−3) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.
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公开(公告)号：US20210116714A1
公开(公告)日：2021-04-22
申请号：US16656290
申请日：2019-10-17
发明人： Hsin-Yu CHEN , Yen-Chiang LIU , Jiun-Jie CHIOU , Jia-Syuan LI , You-Cheng JHANG , Shin-Hua CHEN , Lavanya SANAGAVARAPU , Han-Zong PAN , Chun-Peng LI , Chia-Chun HUNG , Ching-Hsiang HU , Wei-Ding WU , Jui-Chun WENG , Ji-Hong CHIANG , Hsi-Cheng HSU
摘要： Disclosed is a cost-effective method to fabricate a multifunctional collimator structure for contact image sensors to filter ambient infrared light to reduce noises. In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; a plurality of via holes; and a conductive layer, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, and wherein the conductive layer is formed over at least one of the following: the first surface of the first dielectric layer and a portion of sidewalls of each of the plurality of via holes, and wherein the conductive layer is configured so as to allow the optical collimator to filter light in a range of wavelengths.
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公开(公告)号：US20210116713A1
公开(公告)日：2021-04-22
申请号：US16655763
申请日：2019-10-17
发明人： Hsin-Yu CHEN , Chun-Peng LI , Chia-Chun HUNG , Ching-Hsiang HU , Wei-Ding WU , Jui-Chun WENG , Ji-Hong CHIANG , Yen-Chiang LIU , Jiun-Jie CHIOU , Li-Yang TU , Jia-Syuan LI , You-Cheng JHANG , Shin-Hua CHEN , Lavanya SANAGAVARAPU , Han-Zong PAN , Hsi-Cheng HSU
IPC分类号： G02B27/30 , H01L27/146 , H01L31/0232
摘要： Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1×1019 per cubic centimeter (cm−3) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.
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