MINIATURE SPECTRUM CHIP BASED ON UNITS OF DIFFERENT SHAPES, AND METHOD FOR GENERATING MICRO-NANO STRUCTURE ARRAY IN MINIATURE SPECTRUM CHIP

    公开(公告)号:US20230326946A1

    公开(公告)日:2023-10-12

    申请号:US18017829

    申请日:2021-08-03

    Abstract: A miniature spectrum chip includes a CIS wafer and a light modulation layer. The light modulation layer includes a plurality of micro-nano structure units arranged on the surface of a photosensitive area of the CIS wafer. Each micro-nano structure unit include a plurality of micro-nano structure arrays. In each micro-nano structure unit, different micro-nano structure arrays are two-dimensional gratings formed of internal units of different shapes. In each micro-nano structure unit, internal units provided in different micro-nano structure arrays have different shapes, and each group of micro-nano structure arrays has different modulation effects on light of different wavelengths, such that the degree of freedom of “shape” is fully utilized to obtain rich modulation effects on incident light. The precision of spectral restoration is improved. By using two-dimensional grating structures based on internal units of different shapes, rich wide-spectrum modulation characteristics with regard to incident light are achieved.

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