公开(公告)号：US11807792B2

公开(公告)日：2023-11-07

申请号：US17181352

申请日：2021-02-22

Applicant: TOKYO OHKA KOGYO CO., LTD.

Inventor： Takahiro Eto ,  Lihong Liu

IPC: C09K13/04 ,  H01L21/306 ,  C09K13/06 ,  H01L21/3213 ,  C09K13/08 ,  H01L21/311

CPC classification number: C09K13/04 ,  C09K13/06 ,  C09K13/08 ,  H01L21/30604 ,  H01L21/31111 ,  H01L21/32134

Abstract: A semiconductor processing liquid including hydrofluoric acid, and an organic solvent, in which the organic solvent contains a compound represented by the formula below in which X1 is a single bond or an alkylene group having 1 to 6 carbon atoms, in which an ether bond may be interposed, Y10 is one of —O—, —(C═O)—, —O—(C═O)—, and —(C═O)—O—, Y20 is one of —(C═O)—, —O—(C═O)—, and —(C═O)—O—, and Y11 and Y21 are each independently a single bond or an alkylene group having 1 to 6 carbon atoms in which an ether bond may be interposed, provided that, X1, Y11, and Y21 do not contain hydroxyl groups in structures thereof, and when X1 is a single bond, Y10 is not —O—)

H3C—Y11—Y10—X1—Y20—Y21—CH3  (1).

公开(公告)号：US11773324B2

公开(公告)日：2023-10-03

申请号：US17812587

申请日：2022-07-14

Applicant: TOKYO OHKA KOGYO CO., LTD.

Inventor： Takahiro Eto ,  Lihong Liu

IPC: C09K13/04 ,  H01L21/306 ,  C09K13/06 ,  H01L21/3213 ,  C09K13/00 ,  C09K13/08 ,  H01L21/311 ,  H01L21/02

CPC classification number: C09K13/04 ,  C09K13/00 ,  C09K13/06 ,  C09K13/08 ,  H01L21/02052 ,  H01L21/02057 ,  H01L21/30604 ,  H01L21/31111 ,  H01L21/32133 ,  H01L21/32134

Abstract: A semiconductor processing liquid including hydrofluoric acid, and an organic solvent, in which the organic solvent contains a compound represented by the formula below in which X1 is a single bond or an alkylene group having 1 to 6 carbon atoms, in which an ether bond may be interposed, Y10 is one of —O—, —(C═O)—, —O—(C═O)—, and —(C═O)—O—, Y20 is one of —(C═O)—, —O—(C═O)—, and —(C═O)—O—, and Y11 and Y21 are each independently a single bond or an alkylene group having 1 to 6 carbon atoms in which an ether bond may be interposed, provided that, X1, Y11, and Y21 do not contain hydroxyl groups in structures thereof, and when X1 is a single bond, Y10 is not —O—)

H3C—Y11—Y10—X1—Y20—Y21—CH3  (1).