CAPACITIVE PRESSURE SENSOR
    1.
    发明申请

    公开(公告)号:US20220268653A1

    公开(公告)日:2022-08-25

    申请号:US17668136

    申请日:2022-02-09

    IPC分类号: G01L9/00

    摘要: A capacitive sensor device is fabricated on a dielectric substrate. The capacitive sensor device may include multiple diaphragms that differ in shape and/or size. Each of the diaphragms is paired to upper and lower electrodes in included upper and lower electrode layers, respectively. The lower layer is on the dielectric substrate and couples the lower electrodes to a lower electrode terminal in parallel. The upper electrode layer is separated from the lower electrode layer by a gap defined by a removed sacrificial layer and couples the upper electrodes in parallel to an upper electrode terminal.

    Microfabricated gas flow structure

    公开(公告)号:US10794374B2

    公开(公告)日:2020-10-06

    申请号:US15006034

    申请日:2016-01-25

    摘要: A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.

    Environmental logging system
    3.
    发明授权

    公开(公告)号:US10782446B2

    公开(公告)日:2020-09-22

    申请号:US15410724

    申请日:2017-01-19

    IPC分类号: G01V11/00

    摘要: An environmental logging system that includes a housing and an electronic logging circuit sealed within the housing. The logging circuit includes an energy source, transducer, charging circuit, trigger circuit, electronic control unit (ECU), and transmitter. The energy source is charged by the charging circuit using electricity from the transducer in response to external energy applied to the transducer. Commands may also be received by the circuit via the transducer. The ECU includes a processor, memory, and one or more sensors, and it operates under power from the energy source to store data from the sensor(s). The transmitter is coupled to the ECU and transmits the data via electromagnetic radiation outside the housing. The trigger circuit supplies operating power to the processor only when the voltage level of the energy source is above a minimum threshold. The housing may be a tubular shell filled with a polymeric material.

    MICROFABRICATED GAS FLOW STRUCTURE
    4.
    发明申请
    MICROFABRICATED GAS FLOW STRUCTURE 审中-公开
    微流化气体流动结构

    公开(公告)号:US20160230751A1

    公开(公告)日:2016-08-11

    申请号:US15006034

    申请日:2016-01-25

    IPC分类号: F04B37/06 C23C16/455

    摘要: A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.

    摘要翻译: 微制造气流结构包括并排平行流布置的垂直气流通道阵列。 相邻的气体流动通道被薄壁分开,该薄壁的厚度可以比通道宽度小一个数量级或更多,为阵列提供了非常高的面积效率。 通道壁可以由介电材料形成,以提供具有纳米级厚度的足够完整性的壁,并且在横向方向上提供热绝缘性能,从而当采用气流结构作为克努森泵时控制功率损失。 气体流动结构可以从SOI晶片作为整体结构微制成,其中气体流动通道形成在器件层中,并且散热器由手柄层形成。

    Magnetoelastic implantable actuation device and method

    公开(公告)号:US11083624B2

    公开(公告)日:2021-08-10

    申请号:US15739625

    申请日:2016-06-24

    IPC分类号: A61F9/007 A61M27/00

    摘要: An implantable actuation device that may be used with a glaucoma drainage device or attached to an ocular surface, a method of making an implantable actuation device, and a method of preventing cell adhesion resulting from a glaucoma treatment procedure. The implantable actuation device is made from a magnetoelastic material. Actuation of the magnetoelastic material may help control cellular adhesion that may develop and undesirably disrupt proper healing when recovering from invasive surgical treatments. The implantable actuation devices may have small form factors and customized geometries which include three-dimensional curvatures to help promote the actuation of liquid flow and facilitate the removal of unwanted cells.

    Microdischarge-based transducer
    8.
    发明授权

    公开(公告)号:US10006823B2

    公开(公告)日:2018-06-26

    申请号:US14899632

    申请日:2014-06-20

    IPC分类号: G01L9/00 E21B47/06

    摘要: The distance between microscale electrodes can be determined from microdischarge current and/or capacitance distribution among a plurality of electrodes. A microdischarge-based pressure sensor includes a reference pair of electrodes on a body of the sensor and a sensing pair of electrodes. One of the electrodes of the sensing pair is on a diaphragm of the sensor so that the distance between the sensing pair of electrodes changes with diaphragm movement, while the distance between the reference pair does not. Plasma and current distribution within a microdischarge chamber of the sensor is sensitive to very small diaphragm deflections. Pressure sensors can be fabricated smaller than ever before, with useful signals from 50 micron diaphragms spaced only 3 microns from the sensor body. The microdischarge-based sensor is capable of operating in harsh environments and can be fabricated along-side similarly configured capacitive sensors.

    Magnetoelastic strain sensor
    9.
    发明授权

    公开(公告)号:US09726557B2

    公开(公告)日:2017-08-08

    申请号:US14531418

    申请日:2014-11-03

    CPC分类号: G01L1/12 H01L41/125

    摘要: A strain sensor having an active area that includes a magnetoelastic resonator and spring configured so that the spring undergoes a greater amount of strain than the resonator when the sensor is under load. The sensor is anchored at opposite ends of the active area to a substrate for which strain is to be measured. An interrogating coil is used for wireless sensor readout. A biasing magnet may be included to provide a desired sensor response for the particular application of the sensor. The strain sensor may be implemented as a differential strain sensor that includes a second, strain-independent reference resonator.

    MAGNETOELASTIC STRAIN SENSOR
    10.
    发明申请
    MAGNETOELASTIC STRAIN SENSOR 有权
    磁感应传感器

    公开(公告)号:US20150122044A1

    公开(公告)日:2015-05-07

    申请号:US14531418

    申请日:2014-11-03

    IPC分类号: G01L1/12

    CPC分类号: G01L1/12 H01L41/125

    摘要: A strain sensor having an active area that includes a magnetoelastic resonator and spring configured so that the spring undergoes a greater amount of strain than the resonator when the sensor is under load. The sensor is anchored at opposite ends of the active area to a substrate for which strain is to be measured. An interrogating coil is used for wireless sensor readout. A biasing magnet may be included to provide a desired sensor response for the particular application of the sensor. The strain sensor may be implemented as a differential strain sensor that includes a second, strain-independent reference resonator.

    摘要翻译: 一种应变传感器,其具有有源区域,该有源区域包括磁弹性共振器和弹簧,所述弹性共振器和弹簧被构造成使得当传感器处于负载时弹簧经受比谐振器更大的应变量。 将传感器锚定在有源区域的相对端到要测量应变的衬底。 询问线圈用于无线传感器读出。 可以包括偏置磁体以为传感器的特定应用提供期望的传感器响应。 应变传感器可以被实现为包括第二应变非相关参考谐振器的差分应变传感器。