公开(公告)号：US10006823B2

公开(公告)日：2018-06-26

申请号：US14899632

申请日：2014-06-20

申请人： The Regents of the University of Michigan

发明人： Yogesh Gianchandani ,  Christine Eun ,  Xin Luo ,  Mark Kushner ,  Zhongmin Xiong ,  Jun-Chieh Wang

IPC分类号： G01L9/00 ,  E21B47/06

CPC分类号： G01L9/0072 ,  E21B47/06 ,  G01L9/0042 ,  G01L9/0051 ,  G01L9/0073

摘要： The distance between microscale electrodes can be determined from microdischarge current and/or capacitance distribution among a plurality of electrodes. A microdischarge-based pressure sensor includes a reference pair of electrodes on a body of the sensor and a sensing pair of electrodes. One of the electrodes of the sensing pair is on a diaphragm of the sensor so that the distance between the sensing pair of electrodes changes with diaphragm movement, while the distance between the reference pair does not. Plasma and current distribution within a microdischarge chamber of the sensor is sensitive to very small diaphragm deflections. Pressure sensors can be fabricated smaller than ever before, with useful signals from 50 micron diaphragms spaced only 3 microns from the sensor body. The microdischarge-based sensor is capable of operating in harsh environments and can be fabricated along-side similarly configured capacitive sensors.