公开(公告)号：US20230246320A1

公开(公告)日：2023-08-03

申请号：US17587373

申请日：2022-01-28

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Adam Joseph FRUEHLING ,  Juan Alejandro HERBSOMMER ,  Bichoy Waguih BAHR ,  Argyrios DELLIS

IPC: H01P5/02 ,  H01P11/00 ,  H01L23/66

CPC classification number: H01P5/02 ,  H01P11/001 ,  H01L23/66 ,  H01L2223/6627

Abstract: In a described example, an apparatus includes a first substrate having a first side, a second side, and a coupling interface across a portion of the first side. The coupling interface including an arrangement of subwavelength periodic structures formed in the first substrate. A second substrate is coupled to a portion of the second side of the first substrate to form a sealed cavity aligned with the coupling interface.