公开(公告)号：US20240042462A1

公开(公告)日：2024-02-08

申请号：US18227277

申请日：2023-07-27

Applicant: TES CO., LTD

Inventor： Kyung-Ho JANG ,  Byeong-Ho YUN ,  Min-Wook KANG

IPC: B05B1/00 ,  B05C5/02 ,  C23C16/455

CPC classification number: B05B1/005 ,  B05C5/0275 ,  B05C5/0225 ,  C23C16/45565 ,  C23C16/4557

Abstract: The present disclosure relates to a showerhead assembly and a substrate processing apparatus, and more particularly to a showerhead assembly and a substrate processing apparatus including a ceramic heater that heats a substrate and by which hole processing is freely performed in a relatively high temperature process.

公开(公告)号：US20240042463A1

公开(公告)日：2024-02-08

申请号：US18227279

申请日：2023-07-27

Applicant: TES CO., LTD

Inventor： Kyung-Ho JANG ,  Byeong-Ho YUN ,  Min-Wook KANG

IPC: B05B1/00 ,  B05C5/02 ,  C23C16/455

CPC classification number: B05B1/005 ,  B05C5/0275 ,  B05C5/0225 ,  C23C16/45565 ,  C23C16/4557

Abstract: The present disclosure relates to a showerhead assembly and a substrate processing apparatus, and more particularly to a showerhead assembly and a substrate processing apparatus including a ceramic heater that heats a substrate and by which hole processing is freely performed in a relatively high temperature process.