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公开(公告)号：US20250022730A1
公开(公告)日：2025-01-16
申请号：US18767916
申请日：2024-07-09
Applicant: TES CO., LTD
Inventor： Jin-Hyung KIM
IPC: H01L21/67 , H01L21/673
Abstract: The present disclosure relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus for detecting tilting or offset of a tray supporting a substrate when a processing process such as a drying process for a substrate using supercritical fluid.
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