ELECTROMAGNETIC WAVE SENSOR
    3.
    发明公开

    公开(公告)号:US20240159591A1

    公开(公告)日:2024-05-16

    申请号:US18384630

    申请日:2023-10-27

    CPC classification number: G01J5/023 G01J2005/202

    Abstract: An electromagnetic wave sensor includes: a first wire which extends in a first direction; a second wire which extends in a second direction different from the first direction; and an electromagnetic wave detector which is electrically connected to the first wire and is electrically connected to the second wire, wherein the second wire is provided so as to leave an interval with respect to the first wire in a third direction orthogonal to the first direction and the second direction, and the second wire is disposed to three-dimensionally intersect the first wire. At least one wire of the first wire and the second wire includes a wide portion, which is wider than an average value of a width of a portion excluding an overlapping portion of the at least one wire, in the overlapping portion in which the first wire and the second wire overlap each other.

    THERMISTOR ELEMENT AND ELECTROMAGNETIC WAVE SENSOR

    公开(公告)号:US20240304361A1

    公开(公告)日:2024-09-12

    申请号:US18595669

    申请日:2024-03-05

    CPC classification number: H01C7/008 G01J5/20 G01J2005/202

    Abstract: A thermistor element includes: a thermistor film formed of an oxide having a spinel crystal structure; a first surface-side electrode provided in contact with a first surface of the thermistor film; and a second surface-side electrode provided in contact with a second surface of the thermistor film, wherein the first surface-side electrode includes a first electrode and a second electrode, and at least a part of the first electrode and at least a part of the second electrode are disposed to overlap the second surface-side electrode, and in the thermistor film, an oxygen concentration of a second region between the first electrode and the second electrode in a plan view is higher than that of a first region consisting of a region that overlaps the first electrode and the second surface-side electrode and a region that overlaps the second electrode and the second surface-side electrode.

    ELECTROMAGNETIC WAVE SENSOR
    7.
    发明公开

    公开(公告)号:US20240210249A1

    公开(公告)日:2024-06-27

    申请号:US18387883

    申请日:2023-11-08

    CPC classification number: G01J5/22 G01J5/0853

    Abstract: The electromagnetic wave sensor includes: a first substrate; a first wire which extends in a first direction parallel to a substrate surface of the first substrate in a plan view from a direction perpendicular to the substrate surface; a second wire which extends in a direction parallel to the substrate surface and different from the first direction in the plan view; and an electromagnetic wave detector which is electrically connected to the first wire and is electrically connected to the second wire, wherein the first wire is located on the first substrate side in relation to the electromagnetic wave detector in a third direction orthogonal to the first direction and the second direction and the second wire is located on a side opposite to the first substrate in relation to the electromagnetic wave detector in the third direction.

    ELECTROMAGNETIC WAVE SENSOR AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20230296443A1

    公开(公告)日:2023-09-21

    申请号:US18180297

    申请日:2023-03-08

    CPC classification number: G01J5/20 G01J2005/202

    Abstract: Electromagnetic wave sensor (infrared sensor) 1 has: a first substrate; a second substrate that faces the first substrate and that allows infrared rays to pass through at least a part of the second substrate; first circumferential wall 4a that is positioned between the first substrate and the second substrate and that forms first space 8a together with the first and second substrates; bolometer structures 7 that are provided in first space 8a; first measuring element 9a that is provided in first space 8a and that is used for taking a first measurement relating to pressure P1 in first space 8a; and a monitoring portion. The monitoring portion acquires the first measurement that is taken using first measuring element 9a and outputs a predetermined signal indicating an abnormality based on at least the first measurement.

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