公开(公告)号：US20190077655A1

公开(公告)日：2019-03-14

申请号：US15255757

申请日：2016-09-02

Applicant: TDK CORPORATION

Inventor： Jotaro AKIYAMA ,  Kenji ENDOU ,  Takashi AOYAGI ,  Katsunori OSANAI ,  Tohru INOUE

IPC: B81B7/02 ,  B81B7/00 ,  B81B3/00

CPC classification number: B81B7/02 ,  B81B3/0097 ,  B81B7/008 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/04 ,  H01H1/00 ,  H01H1/0036 ,  H01H2001/0084 ,  H01H2057/006

Abstract: A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second signal line and performs connection between the first signal line and the second signal line according to deformation of the first beam.