专利检索 ap:("TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.") AND inv:"CHI JIA WANG" 第 1 页

1.

发明公开
WAFER CARRIER HAVING INSPECTION WINDOW AND OPERATING METHOD THEREOF 审中-公开

公开(公告)号：US20240347359A1

公开(公告)日：2024-10-17

申请号：US18298503

申请日：2023-04-11

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

发明人： CHI JIA WANG , CHI-CHUNG JEN , KAI-HUNG HSIAO , HUI AN LI , WEN-CHIH CHIANG

IPC分类号： H01L21/673 , G02F1/1334 , G06T7/00 , H01L21/67

CPC分类号： H01L21/67386 , G02F1/1334 , G06T7/001 , H01L21/67288 , G06T2207/30148 , H01L21/67733

摘要： A method includes: receiving at least one semiconductor wafer to a wafer carrier, wherein the wafer carrier has an inspection window arranged on a side of the wafer carrier; transporting the wafer carrier between a plurality of semiconductor tools; and in response to an emergent event, switching the inspection window to a transparent mode for a predetermined period.