Magnetically Guided Material Handling Robot
    4.
    发明申请

    公开(公告)号:US20200262660A1

    公开(公告)日:2020-08-20

    申请号:US16788993

    申请日:2020-02-12

    摘要: An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.