摘要:
A method of manufacturing a perpendicular magnetic recording medium substrate is capable of reducing the waviness of all wavelength components and a recording medium is capable of reducing contact with a magnetic head to improve the flying stability of the magnetic head. The method includes two polishing operations. The first operation includes polishing a substrate having a Ni—P-based alloy underlayer with a first porous material that includes 0.1 wt % to 25 wt % of alumina, titania, silica, and zirconia abrasive while supplying a first slurry liquid including an organic or inorganic acid and a first abrasive to the underlayer of the substrate. The second operation includes polishing a surface of the underlayer polished in the first polishing with a second porous material while supplying a second slurry liquid including an organic or inorganic acid and a second abrasive with a grain diameter smaller than that of the first abrasive.
摘要:
A perpendicular magnetic recording media substrate, suitable for magnetic recording media using the perpendicular magnetic recording method, is disclosed. Texturing is used to polish the substrate. A polishing tape is pressed against a substrate, while a polishing slurry comprising abrasive particles is supplied onto the substrate for perpendicular magnetic recording media while it is rotated, to perform texturing of the substrate. The average fiber diameter of polishing fibers contained in the polishing tape is 400 nm or less, and the average particle diameter of abrasive particles contained in the polishing slurry is 150 nm or less.