COLORED NEGATIVE PHOTORESIST COMPOSITION, COLORED PATTERN COMPRISING THE SAME, AND METHOD FOR PRODUCING THE COLORED PATTERN
    1.
    发明申请
    COLORED NEGATIVE PHOTORESIST COMPOSITION, COLORED PATTERN COMPRISING THE SAME, AND METHOD FOR PRODUCING THE COLORED PATTERN 审中-公开
    有色负离子组合物,包含它们的着色图案和用于生产彩色图案的方法

    公开(公告)号:US20090185059A1

    公开(公告)日:2009-07-23

    申请号:US12302773

    申请日:2007-05-25

    摘要: The present invention relates to a colored negative photoresist composition comprising a coloring agent (A), an alkali soluble binder polymer (B), a photopolymerizable compound (C), a photopolymerization initiator (D), and a solvent (E), wherein the alkali soluble binder polymer (B) is a polymer comprising the monomer represented by the following Formula 1 and a monomer having a carboxyl group. The colored negative photoresist composition of the present invention improves adhesion to a silicone wafer, in particular, an SiN wafer, to prevent a separation or tear in the lining, and to form a rectangular pattern, thereby being able to be effectively used in a complementary metal oxide semiconductor.

    摘要翻译: 本发明涉及着色剂(A),碱溶性粘合剂聚合物(B),光聚合性化合物(C),光聚合引发剂(D)和溶剂(E)的着色负性光致抗蚀剂组合物,其中, 碱溶性粘合剂聚合物(B)是包含由下式1表示的单体和具有羧基的单体的聚合物。 本发明的着色负型光致抗蚀剂组合物提高了与硅晶片,特别是SiN晶片的粘附性,以防止衬里中的分离或撕裂,并形成矩形图案,从而能够有效地用于互补 金属氧化物半导体。