公开(公告)号：US12165571B2

公开(公告)日：2024-12-10

申请号：US18085162

申请日：2022-12-20

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  FOUNDATION OF SOONGSIL UNIVERSITY-INDUSTRY COOPERATION

Inventor： Junsik Hwang ,  Geonwook Yoo ,  Hojin Lee ,  Yongchan Kim ,  Kyungwook Hwang

IPC: G09G3/32

Abstract: A driving circuit board includes a driving circuit board includes: a plurality of driving electrode regions on a surface of the driving circuit board; a plurality of driving electrodes symmetrically arranged on the plurality of driving electrode regions; and a driving circuit electrically connected to at least one of the plurality of driving electrodes, wherein the plurality of driving electrodes include at least one dummy electrode that is not connected to the driving circuit.

公开(公告)号：US11720027B2

公开(公告)日：2023-08-08

申请号：US17409715

申请日：2021-08-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae Lee ,  Ohkug Kwon ,  Sunghyup Kim ,  Yongchan Kim ,  Ouiserg Kim ,  Jeonggil Kim ,  Junghwan Kim ,  Hosun Yoo ,  Daerim Choi ,  Dongkyeng Han

IPC: H05G2/00 ,  G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70033 ,  G03F7/70166 ,  G03F7/70858 ,  G03F7/70916

Abstract: An extreme ultraviolet (EUV) light generating apparatus includes a vessel including a first end and a second end opposite to each other and providing an internal space extending from the first end to the second end, a concave mirror adjacent to the first end of the vessel, a droplet generator supplying a droplet to the internal space of the vessel, a laser light source irradiating a laser beam to cause the droplet to emit EUV light, and a gas jet receiving a flow control gas and spraying the received flow control gas into the internal space of the vessel. The gas jet includes a ring-shaped main body including nozzles spaced apart from one another in a circumferential direction. The nozzles spray the received flow control gas in a downward direction.

公开(公告)号：US20220082946A1

公开(公告)日：2022-03-17

申请号：US17409715

申请日：2021-08-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae Lee ,  Ohkug Kwon ,  Sunghyup Kim ,  Yongchan Kim ,  Ouiserg Kim ,  Jeonggil Kim ,  Junghwan Kim ,  Hosun Yoo ,  Daerim Choi ,  Dongkyeng Han

IPC: G03F7/20

Abstract: An extreme ultraviolet (EUV) light generating apparatus includes a vessel including a first end and a second end opposite to each other and providing an internal space extending from the first end to the second end, a concave mirror adjacent to the first end of the vessel, a droplet generator supplying a droplet to the internal space of the vessel, a laser light source irradiating a laser beam to cause the droplet to emit EUV light, and a gas jet receiving a flow control gas and spraying the received flow control gas into the internal space of the vessel. The gas jet includes a ring-shaped main body including nozzles spaced apart from one another in a circumferential direction. The nozzles spray the received flow control gas in a downward direction.