公开(公告)号：US11720027B2

公开(公告)日：2023-08-08

申请号：US17409715

申请日：2021-08-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae Lee ,  Ohkug Kwon ,  Sunghyup Kim ,  Yongchan Kim ,  Ouiserg Kim ,  Jeonggil Kim ,  Junghwan Kim ,  Hosun Yoo ,  Daerim Choi ,  Dongkyeng Han

IPC: H05G2/00 ,  G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70033 ,  G03F7/70166 ,  G03F7/70858 ,  G03F7/70916

Abstract: An extreme ultraviolet (EUV) light generating apparatus includes a vessel including a first end and a second end opposite to each other and providing an internal space extending from the first end to the second end, a concave mirror adjacent to the first end of the vessel, a droplet generator supplying a droplet to the internal space of the vessel, a laser light source irradiating a laser beam to cause the droplet to emit EUV light, and a gas jet receiving a flow control gas and spraying the received flow control gas into the internal space of the vessel. The gas jet includes a ring-shaped main body including nozzles spaced apart from one another in a circumferential direction. The nozzles spray the received flow control gas in a downward direction.

公开(公告)号：US20220082946A1

公开(公告)日：2022-03-17

申请号：US17409715

申请日：2021-08-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae Lee ,  Ohkug Kwon ,  Sunghyup Kim ,  Yongchan Kim ,  Ouiserg Kim ,  Jeonggil Kim ,  Junghwan Kim ,  Hosun Yoo ,  Daerim Choi ,  Dongkyeng Han

IPC: G03F7/20

Abstract: An extreme ultraviolet (EUV) light generating apparatus includes a vessel including a first end and a second end opposite to each other and providing an internal space extending from the first end to the second end, a concave mirror adjacent to the first end of the vessel, a droplet generator supplying a droplet to the internal space of the vessel, a laser light source irradiating a laser beam to cause the droplet to emit EUV light, and a gas jet receiving a flow control gas and spraying the received flow control gas into the internal space of the vessel. The gas jet includes a ring-shaped main body including nozzles spaced apart from one another in a circumferential direction. The nozzles spray the received flow control gas in a downward direction.