公开(公告)号：US20250075323A1

公开(公告)日：2025-03-06

申请号：US18442991

申请日：2024-02-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SungYoung YOON ,  Sung-Yeol KIM ,  Jaehyun CHOI ,  Meehyun LIM ,  Dongseok KANG ,  Youngil KANG ,  Dongsu KIM

IPC: C23C16/458 ,  C23C16/509 ,  C23C16/52

Abstract: A substrate support according to an embodiment includes: a body portion that has a substrate disposition surface at an upper portion thereof; an RF electrode that is disposed inside the body portion; a heater electrode that is disposed below the RF electrode; and a shaft that is formed on a lower portion surface disposed at an opposite side of the substrate disposition surface and has a hollow. The RF electrode includes a first outer RF electrode surrounding the outside of the substrate disposition surface, an inner RF electrode disposed parallel to the substrate disposition surface below the substrate disposition surface, a second outer RF electrode disposed between the inner RF electrode and the heater electrode, an inner electrode conductor having one end connected to the inner RF electrode to be disposed to penetrate the shaft, and an outer electrode conductor having one end connected to the second outer RF electrode to be disposed to penetrate the shaft, and the first outer RF electrode, the inner RF electrode, and the second outer RF electrode are spaced apart from each other to have a non-contact structure.

公开(公告)号：US20240312765A1

公开(公告)日：2024-09-19

申请号：US18599825

申请日：2024-03-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung Min LEE ,  Myung Jae YOO ,  Sung-Yeol KIM ,  Sang Yeol PARK ,  Sung Yong LIM ,  Eun Suk LIM ,  Min Ju JEONG ,  Yong Won CHO

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/3299 ,  H01J2237/24564

Abstract: A substrate processing apparatus including the controller are provided. The controller includes: a signal analyzer configured to detect at least one of an amplitude, phase, and frequency of a first signal, which is provided to a chamber; a radio frequency (RF) signal generator configured to generate an RF signal with a natural frequency based on a power of the first signal; a harmonic controller configured to generate a second signal based on the power of the first signal and at least one of the amplitude, phase, and frequency of the first signal, the second signal having a different amplitude, a different phase, and/or a different frequency from the RF signal; an operator configured to perform an operation on the RF signal and the second signal; and a filter configured to generate an RF control signal by filtering an output signal of the operator.

公开(公告)号：US20230116739A1

公开(公告)日：2023-04-13

申请号：US17856413

申请日：2022-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung Hwi CHO ,  Sung-Yeol KIM ,  Mee Hyun LIM ,  Sung Yong LIM ,  Seong Ha JEONG ,  Woong Jin CHEON

IPC: H01J37/32

Abstract: A substrate processing apparatus is provided. The substrate processing apparatus includes a chamber comprising a support, the support configured to have mounted thereon a substrate; at least one channel disposed in the chamber and into which a conductive fluid or a non-conductive fluid is configured to be injected; and a control unit. The control unit includes a first pump and a second pump configured to respectively supply the conductive fluid and the non-conductive fluid to the at least one channel; and a first valve configured to receive the conductive fluid and the non-conductive fluid from the first pump and the second pump, respectively, and control proportions at which the conductive fluid and the non-conductive fluid are injected into the at least one channel.

公开(公告)号：US20200166563A1

公开(公告)日：2020-05-28

申请号：US16437675

申请日：2019-06-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mee-Hyun LIM ,  Sung-Yeol KIM ,  Seong-Keun CHO ,  Won-Don JOO ,  Jae-Hong KIM ,  Taek-Jin KIM ,  Kyung-Min LEE ,  Sang-Min LEE

IPC: G01R31/26 ,  G01R31/308 ,  G01R1/07 ,  G01N21/21

Abstract: In a method of testing an interconnection substrate, a blocking condition of a reference light reflected from a probe having an intrinsic optical characteristic may be set. An electric field emitted from a test interconnection substrate having a plurality of circuits may change the intrinsic optical characteristics of the probe into test optical characteristics. Light may be irradiated to the probe having the test optical characteristics. The reference light reflected from the probe having the test optical characteristic may be blocked in accordance with the blocking condition. The remaining reflected light that may be due to an abnormal circuit may be detected.