Gate All Around Semiconductor Device
    3.
    发明申请
    Gate All Around Semiconductor Device 审中-公开
    门全周用半导体器件

    公开(公告)号:US20140225169A1

    公开(公告)日:2014-08-14

    申请号:US13832017

    申请日:2013-03-15

    CPC classification number: H01L29/42392 H01L29/66545 H01L29/785 H01L29/78696

    Abstract: A gate all around (GAA) type semiconductor device is provided. The GAA type semiconductor device includes source/drain layers formed to be spaced apart from each other, a channel layer connecting the source/drain layers, and a gate electrode formed along the periphery of at least a portion of the channel layer, wherein lower portions of the source/drain layers are formed more deeply than the channel layer, and an insulation pattern is formed between the lower portions of the source/drain layers and lower portions of the gate electrode.

    Abstract translation: 提供了全封闭(GAA)型半导体器件。 GAA型半导体器件包括形成为彼此间隔开的源极/漏极层,连接源极/漏极层的沟道层以及沿着沟道层的至少一部分的周边形成的栅电极,其中下部 源极/漏极层的沟道层比沟道层更深地形成,并且在源/漏层的下部和栅电极的下部之间形成绝缘图案。

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