公开(公告)号：US10065402B2

公开(公告)日：2018-09-04

申请号：US15014054

申请日：2016-02-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun Ja Kim ,  Byung-Gook Kim ,  Hwan Chul Jeon ,  Ji-Beom Yoo ,  Dong-Wook Shin ,  Taesung Kim ,  Sooyoung Kim

IPC: B32B37/14 ,  B32B38/18 ,  B32B37/00 ,  G03F1/62 ,  B32B37/10 ,  B32B38/10 ,  B32B37/12 ,  H01L21/00 ,  B32B38/16

Abstract: A method of manufacturing a pellicle assembly, the method including attaching a carbon-containing thin film onto a transfer membrane in a wet atmosphere; attaching the carbon-containing thin film to a pellicle frame in a dry atmosphere while the carbon-containing thin film is attached onto the transfer membrane; and separating the transfer membrane from the carbon-containing thin film while the carbon-containing thin film is attached to the pellicle frame.

公开(公告)号：US20190187052A1

公开(公告)日：2019-06-20

申请号：US16037232

申请日：2018-07-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yoonjung Jang ,  Sooyoung Kim ,  Boodeuk KIM ,  Soojin Lee

IPC: G01N21/64 ,  G03F7/32 ,  G03F7/16 ,  C08B37/16

CPC classification number: G01N21/643 ,  C08B37/0015 ,  G01N2021/6439 ,  G03F7/16 ,  G03F7/327

Abstract: Provided are a material for detecting photoresist and a method for detecting photoresist using the same. The material for detecting photoresist may include a macrocyclic molecule having a hollow structure and a fluorescent substance which is labeled on the macrocyclic molecule, and the macrocyclic molecule is at least one of cyclodexrin, cucurbituril, calixarene, pillararene and catenane.

公开(公告)号：US11058015B2

公开(公告)日：2021-07-06

申请号：US16655938

申请日：2019-10-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hangyu Hwang ,  Changsu Kim ,  Dukjin Kim ,  Sooyoung Kim ,  Jongyoul Noh ,  Sangsik Na ,  Jongbae Jeon ,  Rathore Pranveer Singh ,  Ingook Hong

IPC: H05K5/00 ,  B29C45/27

Abstract: An electronic device is provided. The electronic device includes a housing including a first plate, a second plate facing in a direction opposite to that of the first plate, and a side member enclosing a space between the first plate and the second plate and formed with a method of solidifying a resin including a predetermined amount of rigidity reinforcing material injected into an injection mold and including a plurality of side surfaces, and a gate mark receiving portion formed in each of the plurality of side surfaces of the side member and configured to receive at least one gate mark according to separation of the injection mold. The gate mark receiving portion is formed by a processing portion disposed at a corresponding position inside a cavity of the injection mold.

公开(公告)号：US10890848B2

公开(公告)日：2021-01-12

申请号：US16037232

申请日：2018-07-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yoonjung Jang ,  Sooyoung Kim ,  Boodeuk Kim ,  Soojin Lee

IPC: G03F7/40 ,  G01N21/64 ,  G03F7/32 ,  C08B37/16 ,  G03F7/16 ,  C08L5/16

Abstract: Provided are a material for detecting photoresist and a method for detecting photoresist using the same. The material for detecting photoresist may include a macrocyclic molecule having a hollow structure and a fluorescent substance which is labeled on the macrocyclic molecule, and the macrocyclic molecule is at least one of cyclodexrin, cucurbituril, calixarene, pillararene and catenane.

公开(公告)号：US09753367B2

公开(公告)日：2017-09-05

申请号：US14972258

申请日：2015-12-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Munja Kim ,  Ji-Beom Yoo ,  Sooyoung Kim ,  Taesung Kim ,  Dong-Wook Shin ,  Hwanchul Jeon ,  Seul-Gi Kim

IPC: G03F1/64 ,  G03F1/62 ,  C23C16/26

CPC classification number: G03F1/62 ,  C23C16/26

Abstract: The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.