公开(公告)号：US20240105425A1

公开(公告)日：2024-03-28

申请号：US18244571

申请日：2023-09-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seungwan Yoo ,  Jeongyeon Lee ,  Dohyung Kim ,  Jaehong Park ,  Dongchan Lim

IPC: H01J37/32 ,  H01L21/02 ,  H01L21/67

CPC classification number: H01J37/32422 ,  H01J37/32522 ,  H01J37/32568 ,  H01J37/32715 ,  H01L21/02274 ,  H01L21/67098

Abstract: A substrate processing apparatus including a first chamber configured to accommodate a substrate therein and a second chamber including a heater provided in an internal space thereof, wherein the first chamber includes a target assembly configured to fix a target including a deposition material, a first ion gun configured to irradiate an ion beam onto the target to discharge deposition particles, which are ions of the deposition material, to the substrate, and a second ion gun configured to irradiate a hydrogen ion beam toward the substrate, the second ion gun includes a plasma generator configured to generate plasma, and a first grid electrode and a second grid electrode each configured to extract ions from the container, and the second chamber is configured to be provided with the substrate, on which the hydrogen ion beam has been irradiated, and perform thermal treatment on the substrate.

公开(公告)号：US12018427B2

公开(公告)日：2024-06-25

申请号：US17126999

申请日：2020-12-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jonghyun Jang ,  Seungwan Yoo

IPC: D06F58/20 ,  D06F58/24 ,  D06F58/26

CPC classification number: D06F58/206 ,  D06F58/24 ,  D06F58/26

Abstract: Disclosed is a clothes dryer including a main body, a drum accommodating an object to be dried and configured to be rotatable in the main body, a heat exchanger configured to heat exchange air introduced from the drum, and a base disposed below the drum to mount the heat exchanger thereon. The base includes a guide side wall extending along a flow direction of the air, and a discharge port configured to discharge condensed water generated in the heat exchanger to a sump. The discharge port is provided on one side of the guide side wall to prevent air from leaking into the discharge port.