公开(公告)号：US20220178815A1

公开(公告)日：2022-06-09

申请号：US17370090

申请日：2021-07-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dahm Yu ,  Jaehyun Kim ,  Seonmi Lee ,  Hyunmin Kwon ,  Sangjun Lee

IPC: G01N19/10

Abstract: An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.

公开(公告)号：US11860083B2

公开(公告)日：2024-01-02

申请号：US17370090

申请日：2021-07-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dahm Yu ,  Jaehyun Kim ,  Seonmi Lee ,  Hyunmin Kwon ,  Sangjun Lee

IPC: G01N19/10 ,  G01R31/28

CPC classification number: G01N19/10 ,  G01R31/2862 ,  G01R31/2881 ,  G01R31/2874

Abstract: An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.

公开(公告)号：US11828791B2

公开(公告)日：2023-11-28

申请号：US17549005

申请日：2021-12-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kijae Song ,  Jongkook Kim ,  Dongho Lee ,  Seonmi Lee

IPC: G01R31/28 ,  G01R1/04

CPC classification number: G01R31/2863 ,  G01R1/0441 ,  G01R1/0491 ,  G01R31/2889

Abstract: A test board for testing a semiconductor apparatus includes a first board configured to support a plurality of first Devices Under Test (DUTs) such that the plurality of first DUTs are mounted on the first board, a plurality of first inter-board connectors arranged on the first board, and a plurality of second boards stacked on the first board through the plurality of first inter-board connectors, each second board of the plurality of second boards having a surface configured to support a separate second DUT of a plurality of second DUTs such that the plurality of second DUTs are mounted on separate, respective second boards of the plurality of second board.