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公开(公告)号:US20220178815A1
公开(公告)日:2022-06-09
申请号:US17370090
申请日:2021-07-08
发明人: Dahm Yu , Jaehyun Kim , Seonmi Lee , Hyunmin Kwon , Sangjun Lee
IPC分类号: G01N19/10
摘要: An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.
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2.
公开(公告)号:US20210325450A1
公开(公告)日:2021-10-21
申请号:US17152474
申请日:2021-01-19
发明人: Dahm Yu , Hyunmin Kwon , Jaehyun Kim
摘要: A test apparatus and an automatic test equipment having the same are disclosed. The test apparatus includes a test head having a test area, a socket board combined to the test area of the test, the socket board including a socket body and an active device attached on a first surface of the socket body, the active device configured to operate a semiconductor package, and a heat exchanger arranged on an upper portion of the test head, the heat exchanger being in contact with the socket board.
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公开(公告)号:US11860083B2
公开(公告)日:2024-01-02
申请号:US17370090
申请日:2021-07-08
发明人: Dahm Yu , Jaehyun Kim , Seonmi Lee , Hyunmin Kwon , Sangjun Lee
CPC分类号: G01N19/10 , G01R31/2862 , G01R31/2881 , G01R31/2874
摘要: An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.
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4.
公开(公告)号:US11614483B2
公开(公告)日:2023-03-28
申请号:US17152474
申请日:2021-01-19
发明人: Dahm Yu , Hyunmin Kwon , Jaehyun Kim
摘要: A test apparatus and an automatic test equipment having the same are disclosed. The test apparatus includes a test head having a test area, a socket board combined to the test area of the test, the socket board including a socket body and an active device attached on a first surface of the socket body, the active device configured to operate a semiconductor package, and a heat exchanger arranged on an upper portion of the test head, the heat exchanger being in contact with the socket board.
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