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公开(公告)号:US12279415B2
公开(公告)日:2025-04-15
申请号:US18337134
申请日:2023-06-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Minsu Choi , Myeong-Dong Lee , Hyeon-Woo Jang , Keunnam Kim , Sooho Shin , Yoosang Hwang
Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.
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公开(公告)号:US20220028860A1
公开(公告)日:2022-01-27
申请号:US17192084
申请日:2021-03-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Minsu Choi , Myeong-Dong Lee , Hyeon-Woo Jang , Keunnam Kim , Sooho Shin , Yoosang Hwang
IPC: H01L27/108
Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.
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公开(公告)号:US11723191B2
公开(公告)日:2023-08-08
申请号:US17192084
申请日:2021-03-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Minsu Choi , Myeong-Dong Lee , Hyeon-Woo Jang , Keunnam Kim , Sooho Shin , Yoosang Hwang
IPC: H10B12/00
CPC classification number: H10B12/34 , H10B12/0335 , H10B12/053 , H10B12/315
Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.
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公开(公告)号:US20230337415A1
公开(公告)日:2023-10-19
申请号:US18337134
申请日:2023-06-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Minsu Choi , Myeong-Dong Lee , Hyeon-Woo Jang , Keunnam Kim , Sooho Shin , Yoosang Hwang
IPC: H10B12/00
CPC classification number: H10B12/34 , H10B12/053 , H10B12/315 , H10B12/0335
Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.
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