Method of fabricating semiconductor memory device having protruding contact portion

    公开(公告)号:US12279415B2

    公开(公告)日:2025-04-15

    申请号:US18337134

    申请日:2023-06-19

    Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.

    SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME

    公开(公告)号:US20220028860A1

    公开(公告)日:2022-01-27

    申请号:US17192084

    申请日:2021-03-04

    Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.

    Semiconductor memory devices having protruding contact portions

    公开(公告)号:US11723191B2

    公开(公告)日:2023-08-08

    申请号:US17192084

    申请日:2021-03-04

    CPC classification number: H10B12/34 H10B12/0335 H10B12/053 H10B12/315

    Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.

    SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME

    公开(公告)号:US20230337415A1

    公开(公告)日:2023-10-19

    申请号:US18337134

    申请日:2023-06-19

    CPC classification number: H10B12/34 H10B12/053 H10B12/315 H10B12/0335

    Abstract: Disclosed are a semiconductor memory device and a method of fabricating the same. The device includes a substrate including an active pattern with doped regions, a gate electrode crossing the active pattern between the doped regions, a bit line crossing the active pattern and being electrically connected to one of the doped regions, a spacer on a side surface of the bit line, a first contact coupled to another of the doped regions and spaced apart from the bit line with the spacer interposed therebetween, a landing pad on the first contact, and a data storing element on the landing pad. The another of the doped regions has a top surface, an upper side surface, and a curved top surface that extends from the top surface to the upper side surface. The first contact is in contact with the curved top surface and the upper side surface.

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