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公开(公告)号:US20240213160A1
公开(公告)日:2024-06-27
申请号:US18535143
申请日:2023-12-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyoungpil PARK , Doohwan PARK , Sanghyun LEE , Hyeonmin JEON
IPC: H01L23/532 , H01L23/522
CPC classification number: H01L23/5329 , H01L23/5226 , H01L23/49816
Abstract: A semiconductor device includes a first wiring level layer including a lower wiring layer, a second wiring level layer on the first wiring level layer and including an upper wiring layer, a via level layer positioned between the first wiring level layer and the second wiring level layer and including a via connecting the lower wiring layer to the upper wiring layer, and a reinforcing insulating layer positioned between the lower wiring layer and the upper wiring layer in the via level layer.
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公开(公告)号:US20220068810A1
公开(公告)日:2022-03-03
申请号:US17221191
申请日:2021-04-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seonghun LIM , Wookyung YOU , Kyoungwoo LEE , Juyoung JUNG , Il Sup KIM , Chin KIM , Kyoungpil PARK , Jinhyung PARK
IPC: H01L23/522 , H01L23/528 , H01L27/06
Abstract: A semiconductor device including a transistor on a substrate; an interlayer insulating layer on the transistor; a first metal-containing layer on the interlayer insulating layer; and a second metal-containing layer on the first metal-containing layer, wherein the second metal-containing layer includes a resistor, the resistor includes a first insulating layer on the first metal-containing layer; a resistor metal layer on the first insulating layer; and a second insulating layer on the resistor metal layer, and the resistor metal layer includes a recessed side surface.
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