PRESSURE CONTROL VALVE AND APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

    公开(公告)号:US20190145528A1

    公开(公告)日:2019-05-16

    申请号:US16044639

    申请日:2018-07-25

    Abstract: A pressure control valve may include a valve body, a fixed cylinder and a rotating cylinder. The valve body may have an inlet port and an outlet port. The fixed cylinder may be fixed to an inner wall of the valve body. The fixed cylinder may include a quadrangular first fixed hole connected to the inlet port, and a quadrangular second fixed hole connected to the outlet port. The rotating cylinder may be rotatably arranged in the fixed cylinder. The rotating cylinder may include a quadrangular first pressure control hole selectively connected to the first fixed hole, and a quadrangular second pressure control hole selectively connected to the second fixed hole. Thus, the pressure control valve including the quadrangular fixed hole and the quadrangular pressure control hole may have improved pressure control function.

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