公开(公告)号：US20250012736A1

公开(公告)日：2025-01-09

申请号：US18662244

申请日：2024-05-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohun Kim ,  Mincheol Kwak ,  Junseong Yoon ,  Jeongjin Lee ,  Seungyoon Lee ,  Chan Hwang

IPC: G01N21/956 ,  G01N21/95 ,  G06T7/00

Abstract: A method of optimizing an overlay measurement condition includes measuring, for each overlay measurement condition of multiple overlay measurement conditions, an overlay at multiple positions on a substrate; calculating, for each of the multiple overlay measurement conditions, key parameter indexes (KPIs) based on the measured overlay; converting, for each of the multiple overlay measurement conditions, the KPIs into key parameter function (KPF) values based on a KPF, where each of the KPFs has a same dimensional representation; integrating, for each of the multiple overlay measurement conditions, the KPF values to generate an integrated KPF value; and selecting an optimized overlay measurement condition from among the multiple overlay measurement conditions based on the integrated KPF values associated with each of the multiple overlay measurement conditions.

公开(公告)号：US20240134290A1

公开(公告)日：2024-04-25

申请号：US18332238

申请日：2023-06-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Inbeom Yim ,  Junseong Yoon ,  Seungyoon Lee ,  Jeongjin Lee ,  Chan Hwang

IPC: G03F7/20 ,  G03F7/00 ,  H01L21/66

CPC classification number: G03F7/70633 ,  G03F7/706831 ,  G03F7/706837 ,  H01L22/20

Abstract: Provided are a method of selecting multi-wavelengths for overlay measurement, for accurately measuring overlay, and an overlay measurement method and a semiconductor device manufacturing method using the multi-wavelengths. The method of selecting multi-wavelengths for overlay measurement includes measuring an overlay at multiple positions on a wafer at each of a plurality of wavelengths within a set first wavelength range, selecting representative wavelengths that simulate the overlay of the plurality of wavelengths, from among the plurality of wavelengths, and allocating weights to the representative wavelengths, respectively.