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公开(公告)号:US20240064964A1
公开(公告)日:2024-02-22
申请号:US18191291
申请日:2023-03-28
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jong Min KIM , Chan-Sic YOON , Jun Hyeok AHN
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/485 , H10B12/482 , H10B12/488
Abstract: Provided is a semiconductor memory device. The semiconductor memory device includes a substrate including an active region defined by a device isolation layer, a bit line which is disposed on the substrate and extends in a first direction, a bit line contact which is disposed between the bit line and the substrate and connects the bit line to the active region, a bit line spacer which extends along a sidewall of the bit line, and a bit line contact spacer which extends along a sidewall of the bit line contact and does not extend along the sidewall of the bit line.
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公开(公告)号:US20230262967A1
公开(公告)日:2023-08-17
申请号:US18048561
申请日:2022-10-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jun Hyeok AHN , Sung Woo Kim , Myeong-Dong LEE , Min Ho CHOI
IPC: H01L27/108 , G11C5/06
CPC classification number: H01L27/10897 , G11C5/063 , H01L27/10814
Abstract: A semiconductor memory device may include a substrate including a cell region and a peripheral region along a periphery of the cell region; a cell region isolation layer along the periphery of the cell region in the substrate and defining the cell region; a cell conductive line on the cell region and including a sidewall on the cell region isolation layer; a peripheral gate conductive layer on the peripheral region and including a sidewall on the cell region isolation layer; and an isolation insulating layer in contact with the sidewall of the cell conductive line and the sidewall of the peripheral gate conductive layer on the cell region isolation layer.
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