公开(公告)号：US20230361036A1

公开(公告)日：2023-11-09

申请号：US18140356

申请日：2023-04-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byung Ju KANG ,  Kwan Young Chun ,  Ji Wook Kwon ,  Chul Hong Park ,  Azmat Raheel ,  Suhyeong Choi

IPC: H01L23/528 ,  H01L23/48

CPC classification number: H01L23/5286 ,  H01L23/481

Abstract: A semiconductor device includes a substrate including a first side and a second side opposite to the first side, a first power rail and a second power rail provided on the first side of the substrate, the first power rail and the second power rail extending in a first direction and being separated in a second direction, a first active region and a second active region provided on the first side of the substrate, the first active region and the second active region being defined by an element separation film between the first power rail and the second power rail and being separated in the second direction, a power delivery network provided on the second side of the substrate, and a first power through via penetrating the element separation film and the substrate, the first power through via connecting the power delivery network and the first power rail.

公开(公告)号：US20230361037A1

公开(公告)日：2023-11-09

申请号：US18304560

申请日：2023-04-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byung Ju Kang ,  Pan Jae Park ,  Ji Wook Kwon ,  Chul Hong Park ,  Jae Seok Yang

IPC: H01L23/528 ,  H01L27/092 ,  H01L23/48 ,  H01L29/06 ,  H01L29/423 ,  H01L29/775 ,  G06F30/31

CPC classification number: H01L23/5286 ,  H01L27/092 ,  H01L23/481 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/775 ,  G06F30/31

Abstract: A semiconductor device is provided. The semiconductor device includes a substrate including a first side and a second side that are opposite to each other, a power tap cell in a first row, a second row adjacent to the first row, and a third row adjacent to the second row, on the first side of the substrate, a first power rail and a second power rail on the power tap cell, that extend in a first direction and are spaced apart from each other in a second direction, and a power delivery network on the second side of the substrate. The power tap cell includes a first power through via that penetrates the substrate and extends from the power delivery network to the first power rail, and a second power through via that penetrates the substrate and extends from the power delivery network to the second power rail.