Particle counter and immersion exposure system including the same
    1.
    发明授权
    Particle counter and immersion exposure system including the same 有权
    粒子计数器和浸入曝光系统包括相同

    公开(公告)号:US09250544B2

    公开(公告)日:2016-02-02

    申请号:US14080977

    申请日:2013-11-15

    Abstract: A particle counter may include a housing having an inlet, an outlet, and a window therebetween. The inlet and the outlet may be configured such that a fluid can be flowed therethrough. A plurality of light sources may be arranged outside the housing to provide lights of different wavelengths into the housing through the window. Sensors may be provided outside the housing to detect fractions of the lights scattered by a bubble and/or a particle in the fluid. A control part may be configured to monitor intensities of the lights detected by the sensors and to analyze a difference in intensity between the scattered lights, thereby distinguishing the particles from the bubbles in the fluid.

    Abstract translation: 颗粒计数器可以包括在其间具有入口,出口和窗口的壳体。 入口和出口可以被配置为使得流体可以流过其中。 多个光源可以布置在壳体外部,以通过窗口将不同波长的光提供到壳体中。 传感器可以设置在壳体外部,以检测由气泡和/或流体中的颗粒散射的光的分数。 控制部件可以被配置为监测由传感器检测到的光的强度并且分析散射光之间的强度差,从而将颗粒与流体中的气泡区分开。

Patent Agency Ranking