公开(公告)号：US09887078B2

公开(公告)日：2018-02-06

申请号：US14983530

申请日：2015-12-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Namsuk Kim ,  Ohhyung Kwon ,  Dae-Sung Kim ,  Jutaek Lim ,  Jaehyung Jung

IPC: B08B3/00 ,  H01L21/02 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/0209 ,  H01L21/02041 ,  H01L21/02057 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/68792

Abstract: A single-wafer-type cleaning apparatus is provided. The single-wafer-type cleaning apparatus is configured to be capable of controlling electrostatic charges generated due to rotating a wafer during a semiconductor cleaning process and a defect caused by the electrostatic charges. The cleaning process uses an ionizer mounted on a chuck.

公开(公告)号：US11520431B2

公开(公告)日：2022-12-06

申请号：US17348930

申请日：2021-06-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yunrae Jo ,  Ohkyong Kwon ,  Yoonkyung Choi ,  Jinbong Kim ,  Jaehyung Jung

IPC: G06F3/041

Abstract: A touch display system includes: a display driver integrated circuit (IC) configured to drive a display panel; a touch screen controller configured to drive a touch screen panel; a driving voltage generator configured to provide driving voltages to the display panel, the display driver IC, and the touch screen controller; and a ground modulation device configured to receive a driving signal, which is used to drive the touch screen panel and periodically swings between a first reference voltage level and a second reference voltage level, from the touch screen controller, configured to generate a modulated ground voltage, which periodically swings between the first reference voltage level and the second reference voltage level, based on the driving signal, and configured to provide the modulated ground voltage to the display panel, the display driver IC, and the touch screen controller