公开(公告)号：US10024592B2

公开(公告)日：2018-07-17

申请号：US15726007

申请日：2017-10-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byoung Mok Kim ,  Yong Man Seo ,  Young Jae Song ,  Jae Hyun Lee

IPC: F25D23/00 ,  F25D23/02 ,  F25D23/08

Abstract: A refrigerator includes a storage compartment, an inner door including an opening having a size corresponding to the size of the storage compartment, a plurality of door guards disposed in the opening, and an outer door that opens or closes the opening, wherein the inner door includes inner sidewalls that are disposed at both sides of the opening and are flat from an inlet of the opening to an outlet of the opening without any curve.

公开(公告)号：US12040324B2

公开(公告)日：2024-07-16

申请号：US17405606

申请日：2021-08-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seong-Ho Song ,  Jong Han Lee ,  Jong Ha Park ,  Jae Hyun Lee ,  Jong Hoon Baek ,  Da Bok Jeong

IPC: H01L27/088 ,  H01L21/8234

CPC classification number: H01L27/088 ,  H01L21/823412 ,  H01L21/823418 ,  H01L21/823431 ,  H01L21/823456 ,  H01L27/0886

Abstract: A semiconductor device including a substrate including first and second regions along a first direction, and a third region between the first region and the second region, an active pattern extending in the first direction, on the substrate, and first to third gate electrodes spaced apart from each other and extending in a second direction, on the active pattern, the active pattern of the first region including first semiconductor patterns spaced apart from each other and penetrating the first gate electrode, the active pattern of the second region including second semiconductor patterns spaced apart from each other and penetrating the second gate electrode, the active pattern of the third region including a transition pattern protruding from the substrate and intersecting the third gate electrode and including a sacrificial pattern and a third semiconductor pattern alternately stacked on the third region and including different materials from each other.

公开(公告)号：US11049754B2

公开(公告)日：2021-06-29

申请号：US16031321

申请日：2018-07-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seul Ha Myung ,  Min Joon Park ,  Hyo Sung Kim ,  Kyung Hoon Lee ,  Jae Hyun Lee

IPC: H01L21/683 ,  H01L21/3065 ,  H05H1/00 ,  H01J37/32

Abstract: A method of controlling a semiconductor process includes performing a semiconductor process using plasma in a chamber including an electrostatic chuck (ESC) on which a wafer is seated, obtaining an ESC voltage supplied to the ESC, an ESC current detected from the ESC, and bias power supplied to a bias electrode in the chamber, while the semiconductor process is being performed in the chamber, and determining whether a discharge has occurred between the ESC and the wafer using at least one of the ESC voltage, the ESC current, and the bias power.

公开(公告)号：US09810475B2

公开(公告)日：2017-11-07

申请号：US14073066

申请日：2013-11-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byoung Mok Kim ,  Yong Man Seo ,  Young Jae Song ,  Jae Hyun Lee

IPC: F25D23/02

CPC classification number: F25D23/028 ,  F25D23/02 ,  F25D23/025 ,  F25D23/087 ,  F25D2323/021

Abstract: A refrigerator includes a storage compartment, an inner door including an opening having a size corresponding to the size of the storage compartment, a plurality of door guards disposed in the opening, and an outer door that opens or closes the opening, wherein the inner door includes inner sidewalls that are disposed at both sides of the opening and are flat from an inlet of the opening to an outlet of the opening without any curve.

公开(公告)号：US20140132143A1

公开(公告)日：2014-05-15

申请号：US14073066

申请日：2013-11-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byoung Mok KIM ,  Yong Man Seo ,  Young Jae Song ,  Jae Hyun Lee

IPC: F25D23/02

CPC classification number: F25D23/028 ,  F25D23/02 ,  F25D23/025 ,  F25D23/087 ,  F25D2323/021

Abstract: A refrigerator includes a storage compartment, an inner door including an opening having a size corresponding to the size of the storage compartment, a plurality of door guards disposed in the opening, and an outer door that opens or closes the opening, wherein the inner door includes inner sidewalls that are disposed at both sides of the opening and are flat from an inlet of the opening to an outlet of the opening without any curve.

Abstract translation: 冰箱包括储藏室，内门，其具有与储藏室的尺寸相对应的尺寸的开口，设置在开口中的多个门防护罩以及打开或关闭开口的外门，其中内门 包括设置在开口的两侧并且从开口的入口到开口的出口没有任何曲线的平坦的内侧壁。

公开(公告)号：US20190221403A1

公开(公告)日：2019-07-18

申请号：US16011095

申请日：2018-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seul Ha Myung ,  Hyo Sung Kim ,  Min Joon Park ,  Kyung Hoon Lee ,  Jae Hyun Lee

IPC: H01J37/32 ,  C23C16/455 ,  H01L21/683

CPC classification number: H01J37/32449 ,  C23C16/45565 ,  H01J37/32458 ,  H01J37/32724 ,  H01L21/6831

Abstract: A plasma processing apparatus can include a process chamber and a susceptor in a lower portion of the process chamber. A chuck can be on the susceptor, where the chuck can include an upper surface configured to mount a wafer thereon. A shower head can include a plurality of first regions including gas ports and including a plurality of gas supply pipes separately communicating with the first regions and configured to independently supply a process gas into the process chamber toward the upper surface of the chuck, where each of the gas ports in the first regions includes a plurality of sub-gas ports. A process gas supplier can be configured to supply the process gas to the gas supply pipes and a control unit configured to independently control amounts of the process gas supplied to the gas supply pipes.