IMAGE SENSOR AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240274633A1

    公开(公告)日:2024-08-15

    申请号:US18460753

    申请日:2023-09-05

    Abstract: Disclosed is an image sensor which includes a substrate including an active region that includes a plurality of photoelectric conversion pixels and a peripheral region that extends around the active region, a transparent window on the substrate, a wall structure that is on the peripheral region along a periphery of the substrate and seals a space between the substrate and the transparent window, a planarization insulting layer on the active region and a portion of the peripheral region of the substrate, and a plurality of lens patterns on the planarization insulating layer. The planarization insulting layer includes first to third lens regions, and the lens patterns have different shapes and/or are arranged at different intervals on the first to third lens regions.

    IMAGE SENSOR
    2.
    发明公开
    IMAGE SENSOR 审中-公开

    公开(公告)号:US20240290812A1

    公开(公告)日:2024-08-29

    申请号:US18504674

    申请日:2023-11-08

    CPC classification number: H01L27/14636 H01L27/14634 H01L27/1469

    Abstract: An image sensor comprising a circuit chip and an image sensor chip on the circuit chip. The image sensor chip includes a first substrate extending in a first direction and a second direction, a first interlayer dielectric layer between the first substrate and the circuit chip, and a first bonding pad in the first interlayer dielectric layer and having a first width in a first direction. The circuit chip includes a second substrate, a second interlayer dielectric layer and a third interlayer dielectric layer that are sequentially stacked on the second substrate, and a second bonding pad in the second and third interlayer dielectric layers and having a second width in the first direction. The first and second bonding pads are in contact with each other. A change in the second width along a third direction is greater than a change in the first width along the third direction, the third direction intersects the first and second directions.

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