公开(公告)号：US20140253092A1

公开(公告)日：2014-09-11

申请号：US14200318

申请日：2014-03-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung-Yub JEON ,  Jeong-Yun LEE ,  Chin-Wook CHUNG

IPC: G01N27/00

CPC classification number: H01J37/32954 ,  H01J37/32935

Abstract: To diagnose plasma in a plasma space, a plurality of floating probes are installed at a plurality of points, respectively, in a plasma space. An electron density ratio at each of the points is calculated by measuring a first probe current of each of the floating probes, the probe current including a DC component. A point ion density and a point electron temperature at each of the points are calculated by measuring a second probe current of each of the floating probes before the electron density ratio is calculated, the second probe current excluding the DC component.

Abstract translation: 为了在等离子体空间中诊断等离子体，分别在等离子体空间中的多个点处安装多个浮动探针。 通过测量每个浮动探针的第一探针电流，包括DC分量的探针电流来计算每个点处的电子密度比。 通过在计算电子密度比之前测量每个浮动探针的第二探针电流，除了直流分量之外的第二探针电流，计算每个点处的点离子密度和点电子温度。