专利检索 ap:("Samsung Display Co., Ltd.") AND inv:"Young Bae Kee" 第 1 页

1.

发明授权
Deposition apparatus and method for inspecting nozzle using the same 有权

公开(公告)号：US12085450B2

公开(公告)日：2024-09-10

申请号：US17111258

申请日：2020-12-03

申请人： Samsung Display Co., Ltd.

发明人： Su Hwan Lee , Young Bae Kee , Min Woo Kim , Un Cheol Sung , Byoung Gu An , Jae Soo Ha

IPC分类号： G01J5/00 , B05B15/52 , G01J5/52 , G01J5/60

CPC分类号： G01J5/0037 , B05B15/52 , G01J5/52 , G01J5/60 , G01J2005/0077

摘要： A method for inspecting a nozzle includes: measuring a temperature of the nozzle; comparing the temperature of the nozzle with a reference temperature; and determining whether or not the nozzle is clogged based on the temperature of the nozzle.