公开(公告)号：US20150079711A1

公开(公告)日：2015-03-19

申请号：US14487946

申请日：2014-09-16

Applicant: Samsung Display Co., Ltd.

Inventor： Leonid Kaplan ,  Valeriy Prushinskiy ,  Won-Baek Lee ,  Ji-Ryun Park ,  Hee-Sang Park

IPC: H01L51/56 ,  H01L21/683

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/225 ,  C23C14/243 ,  H01L27/3283 ,  H01L27/3295 ,  H01L51/0004 ,  H01L51/0011 ,  H01L51/5206 ,  H01L51/5221

Abstract: A method for forming a thin film for fabricating an organic light-emitting diode (OLED) display is disclosed. In one aspect, the method includes forming a plurality of shadow masks on a substrate. The substrate is then bent to form a predetermined curvature in the substrate. A deposition source is placed at a position having an equal angle with respect to central and peripheral portions of the substrate. The method also includes depositing a deposition material from the deposition source on the substrate and the shadow masks to form a thin film.

Abstract translation: 公开了一种用于形成用于制造有机发光二极管（OLED）显示器的薄膜的方法。 一方面，该方法包括在基板上形成多个荫罩。 然后将衬底弯曲以在衬底中形成预定的曲率。 沉积源被放置在相对于衬底的中心和周边部分具有相等角度的位置处。 该方法还包括从沉积源沉积在衬底上的沉积材料和荫罩以形成薄膜。

公开(公告)号：US09614192B2

公开(公告)日：2017-04-04

申请号：US14487946

申请日：2014-09-16

Applicant: Samsung Display Co., Ltd.

Inventor： Leonid Kaplan ,  Valeriy Prushinskiy ,  Won-Baek Lee ,  Ji-Ryun Park ,  Hee-Sang Park

IPC: H01L51/56 ,  C23C14/22 ,  H01L51/52 ,  C23C14/04 ,  H01L51/00 ,  C23C14/24 ,  H01L27/32

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/225 ,  C23C14/243 ,  H01L27/3283 ,  H01L27/3295 ,  H01L51/0004 ,  H01L51/0011 ,  H01L51/5206 ,  H01L51/5221

Abstract: A method for forming a thin film for fabricating an organic light-emitting diode (OLED) display is disclosed. In one aspect, the method includes forming a plurality of shadow masks on a substrate. The substrate is then bent to form a predetermined curvature in the substrate. A deposition source is placed at a position having an equal angle with respect to central and peripheral portions of the substrate. The method also includes depositing a deposition material from the deposition source on the substrate and the shadow masks to form a thin film.