公开(公告)号：US20190341277A1

公开(公告)日：2019-11-07

申请号：US16173950

申请日：2018-10-29

Applicant: Samsung Display Co., Ltd.

Inventor： Haeyoung Yoo ,  Taejong Kim ,  Juhee Lee ,  Myungsoo Huh ,  Jaekyu Park ,  Hyunwoo Joo

IPC: H01L21/67 ,  H01J37/32 ,  H01L27/12 ,  H01L21/311 ,  H01L27/32 ,  H01L21/027

Abstract: Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.

公开(公告)号：US10796933B2

公开(公告)日：2020-10-06

申请号：US16173950

申请日：2018-10-29

Applicant: Samsung Display Co., Ltd.

Inventor： Haeyoung Yoo ,  Taejong Kim ,  Juhee Lee ,  Myungsoo Huh ,  Jaekyu Park ,  Hyunwoo Joo

IPC: H01L21/67 ,  H01J37/32 ,  H01L27/12 ,  H01L21/311 ,  H01L21/027 ,  H01L27/32

Abstract: Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.