公开(公告)号：US11723260B2

公开(公告)日：2023-08-08

申请号：US16914446

申请日：2020-06-28

Applicant: Samsung Display Co., Ltd.

Inventor： Min Ho Moon ,  Jin Oh Kwag ,  Seung Yong Song ,  Duck Jung Lee ,  Seul Lee ,  Sung Soon Im

IPC: H01L51/00 ,  H10K71/16 ,  C23C14/04 ,  H10K71/00

CPC classification number: H10K71/166 ,  C23C14/042 ,  H10K71/00

Abstract: A deposition mask for making a display device, the deposition mask includes: a frame including a first opening; a first member disposed above the first opening of the frame and including a first portion surrounding at least one second opening and a second portion disposed in the second opening and physically separated from the first portion; and a second member disposed on the first member and including a first connecting portion connected to the frame and a second mesh portion overlapping the second portion.

公开(公告)号：US12103024B2

公开(公告)日：2024-10-01

申请号：US17878480

申请日：2022-08-01

Applicant: Samsung Display Co., LTD.

Inventor： Duck Jung Lee ,  Ji-Hee Son ,  Sung Soon Im

IPC: B05B12/28 ,  B05C21/00

CPC classification number: B05B12/28 ,  B05C21/005

Abstract: A deposition mask including a resin film including first holes, a non-resin layer disposed on the resin film and including second holes corresponding to the first holes, and a protective layer disposed on the non-resin layer and including third holes corresponding to the first holes, wherein the protective layer includes a first portion disposed on a top surface of the non-resin layer, and a second portion covering a side surface of the second holes of the non-resin layer.

公开(公告)号：US11997913B2

公开(公告)日：2024-05-28

申请号：US18210653

申请日：2023-06-16

Applicant: Samsung Display Co., Ltd.

Inventor： Min Ho Moon ,  Jin Oh Kwag ,  Seung Yong Song ,  Duck Jung Lee ,  Seul Lee ,  Sung Soon Im

IPC: H01L51/56 ,  C23C14/04 ,  H10K71/00 ,  H10K71/16

CPC classification number: H10K71/166 ,  C23C14/042 ,  H10K71/00

Abstract: A deposition mask for making a display device, the deposition mask includes: a frame including a first opening; a first member disposed above the first opening of the frame and including a first portion surrounding at least one second opening and a second portion disposed in the second opening and physically separated from the first portion; and a second member disposed on the first member and including a first connecting portion connected to the frame and a second mesh portion overlapping the second portion.

公开(公告)号：US11345988B2

公开(公告)日：2022-05-31

申请号：US16674997

申请日：2019-11-05

Applicant: Samsung Display Co., Ltd.

Inventor： Hwi Kim ,  In Bae Kim ,  Sung Soon Im ,  Kyu Hwan Hwang

IPC: C23C14/04 ,  C23C16/04 ,  H01L51/56 ,  H01L51/50

Abstract: A method of manufacturing a deposition mask includes preparing a mask-target substrate which has one surface on which a sacrificed layer pattern is formed and comprises a cover area covered by the sacrificed layer pattern and a plurality of exposed areas exposed by the sacrificed layer pattern; forming holes in the exposed areas of the mask-target substrate by emitting laser toward the mask-target substrate; and removing the sacrificed layer pattern, wherein the sacrificed layer pattern has a higher reflectance with respect to the laser than a reflectance of the mask-target substrate.