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公开(公告)号：US11653554B2
公开(公告)日：2023-05-16
申请号：US17014841
申请日：2020-09-08
Applicant: Samsung Display Co., Ltd.
Inventor： Sungsoon Im , Youngmin Moon , Ji-Hee Son , Minho Moon , Seungyong Song , DuckJung Lee , Seul Lee
CPC classification number: H01L51/0011 , C23C14/042 , H01L51/56
Abstract: Provided is a mask which includes a mask body having a plurality of through hole portions and including a polymer film and a plurality of magnetic particles dispersed in the polymer film, and a polymer coating layer disposed on an outer surface of the mask body. Accordingly, the time and cost of manufacturing a mask are reduced and the precision of a deposition process is improved as well, so that the manufacturing yield of a display panel using the mask is improved and a display panel manufactured using the same has improved reliability.
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公开(公告)号：US20210217997A1
公开(公告)日：2021-07-15
申请号：US17067730
申请日：2020-10-11
Applicant: Samsung Display Co., LTD.
Inventor： Jinoh Kwag , Sungsoon Im , Youngmin Moon , Ji-Hee Son , Seungyong Song , DuckJung Lee , Hye Yong Chu
Abstract: Provided is a mask having a plurality of cell areas, each of which has a plurality of through-portions defined therein. The mask includes a mask film including a polymer and a conductive layer disposed on at least one surface of the mask film and including conductive metal or a conductive metal oxide. Accordingly, precision of a deposition process is enhanced while reducing process time and costs in a manufacturing process of the mask, and thus the yield in manufacturing a display panel using the mask is improved. Therefore, the display panel manufactured using the mask may have improved reliability.
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公开(公告)号：US11891688B2
公开(公告)日：2024-02-06
申请号：US17748596
申请日：2022-05-19
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin Moon , Jeongkuk Kim , Minho Moon , Ji-Hee Son , Seungyong Song , Areum Lee
IPC: C23C16/04
CPC classification number: C23C16/042 , C23C16/045
Abstract: A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.
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公开(公告)号：US11773478B2
公开(公告)日：2023-10-03
申请号：US17307386
申请日：2021-05-04
Applicant: Samsung Display Co., Ltd.
Inventor： Duckjung Lee , Ji-Hee Son , Sungsoon Im
CPC classification number: C23C14/042 , H10K71/00 , H10K71/166
Abstract: A deposition mask includes a mask film including a polymer, a plurality of first deposition openings defined in the mask film. and a conductive layer which is on the mask film and receives a power. The conductive layer includes a first conductive pattern and a second conductive pattern spaced apart from each other along the mask film and electrically disconnected from each other. The conductive layer receives the power at the first conductive pattern and the second conductive pattern, and receipt of the power at the first conductive pattern and the second conductive pattern provides an electrostatic chuck function of the deposition mask.
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公开(公告)号：US12054820B2
公开(公告)日：2024-08-06
申请号：US17731799
申请日：2022-04-28
Applicant: Samsung Display Co., Ltd.
Inventor： Minho Moon , Youngmin Moon , Ji-Hee Son , Seungyong Song
CPC classification number: C23C14/042 , B05C21/005 , H10K71/166
Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
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Patent Agency Ranking
公开(公告)号：US11825727B2
公开(公告)日：2023-11-21
申请号：US17396874
申请日：2021-08-09
Applicant: Samsung Display Co., Ltd.
Inventor： Seul Lee , Minho Moon , Youngmin Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im
CPC classification number: H10K71/00 , C23C14/042 , C23C16/042 , G03F7/0015 , H10K59/12
Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.
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公开(公告)号：US11600807B2
公开(公告)日：2023-03-07
申请号：US17250662
申请日：2019-01-25
Applicant: Samsung Display Co., Ltd.
Inventor： Ji-Hee Son , Sungchul Kim , Jiyoung Choung
Abstract: A method of manufacturing a display apparatus includes: forming a first lower lift-off layer, a first upper lift-off layer, and a first photoresist layer on a substrate on which a first pixel electrode is formed; forming a first masking layer including a first photoresist pattern, a first upper lift-off pattern, and a first lower lift-off pattern, which expose the first pixel electrode, by partially removing the first photoresist layer, the first upper lift-off layer, and the first lower lift-off layer; forming a first light emitting layer and a first counter electrode on the first pixel electrode by using the first masking layer; forming a first passivation layer on the first counter electrode; and removing the first masking layer.
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公开(公告)号：US12116660B2
公开(公告)日：2024-10-15
申请号：US17383787
申请日：2021-07-23
Applicant: Samsung Display Co., Ltd.
Inventor： Ji-Hee Son , Minho Moon , Youngmin Moon , Seungyong Song , Seul Lee , Sungsoon Im
IPC: C23C14/04 , C23C16/34 , C23C16/40 , C23C16/56 , G03F7/00 , G03F7/16 , C23C14/24 , C23C14/34 , H10K59/12 , H10K71/16
CPC classification number: C23C14/042 , C23C16/345 , C23C16/401 , C23C16/56 , G03F7/0015 , G03F7/167 , C23C14/24 , C23C14/34 , H10K59/12 , H10K71/166
Abstract: A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.
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公开(公告)号：US12103024B2
公开(公告)日：2024-10-01
申请号：US17878480
申请日：2022-08-01
Applicant: Samsung Display Co., LTD.
Inventor： Duck Jung Lee , Ji-Hee Son , Sung Soon Im
CPC classification number: B05B12/28 , B05C21/005
Abstract: A deposition mask including a resin film including first holes, a non-resin layer disposed on the resin film and including second holes corresponding to the first holes, and a protective layer disposed on the non-resin layer and including third holes corresponding to the first holes, wherein the protective layer includes a first portion disposed on a top surface of the non-resin layer, and a second portion covering a side surface of the second holes of the non-resin layer.
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公开(公告)号：US11864453B2
公开(公告)日：2024-01-02
申请号：US17452279
申请日：2021-10-26
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin Moon , Minho Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im , Junho Jo
IPC: H01L51/56 , C23C14/04 , C23C14/24 , B23K26/244 , B23K26/364 , H10K71/00 , B23K26/0622
CPC classification number: H10K71/00 , B23K26/244 , B23K26/364 , C23C14/042 , C23C14/24 , B23K26/0622
Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
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