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公开(公告)号:US20250073810A1
公开(公告)日:2025-03-06
申请号:US18648481
申请日:2024-04-29
Applicant: Samsung Display Co., Ltd.
Inventor: Hyoungjoo Kim , Eunsu Jun , Seokhwan Kim , Hakmin Kim , Joongbae Pyoun , Ilyoung Jeong
Abstract: A laser cutting apparatus may include a first fixing member rotatable with respect to a first rotation axis extending in a first direction, a first reflection mirror fixed to the first fixing member, a portion of the first reflection mirror being clamped by the first fixing member, the first reflection mirror being rotatable with respect to the first rotation axis together with the first fixing member and configured to reflect a laser light, and a first-1 filling member between the first fixing member and the portion of the first reflection mirror clamped by the first fixing member.
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公开(公告)号:US12059743B2
公开(公告)日:2024-08-13
申请号:US16746563
申请日:2020-01-17
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Seunghwan Jung , Seokhwan Kim , Sanghyun Jung , Woodong Kim , Jaeil Kim , Ilyoung Jeong , Jongkil Han
IPC: B23K26/03 , B23K26/04 , B23K26/08 , B23K37/04 , G05B19/402
CPC classification number: B23K26/032 , B23K26/04 , B23K26/083 , B23K37/04 , G05B19/402 , G05B2219/36199
Abstract: An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage.
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