公开(公告)号：US09745657B2

公开(公告)日：2017-08-29

申请号：US14636309

申请日：2015-03-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hakmin Kim

IPC: C23C16/44 ,  C23C16/04 ,  C23C16/34 ,  H01L51/00 ,  H01L51/52

CPC classification number: C23C16/4405 ,  C23C16/042 ,  C23C16/345 ,  H01L51/0011 ,  H01L51/5256

Abstract: A deposition apparatus includes a chamber, a support in the chamber, the support supporting a substrate, a deposition source in the chamber, the deposition source being above the support and emitting one or more deposition materials toward the substrate, a mask between the support and the deposition source, the mask including a deposition region having one or more openings, the one or more deposition materials passing through the one or more openings, and an edge region having a plurality of first slits, the edge region surrounding the deposition region, and a first coating layer on a first surface of the mask, the first surface of the mask facing the substrate.

公开(公告)号：US20250073810A1

公开(公告)日：2025-03-06

申请号：US18648481

申请日：2024-04-29

Applicant: Samsung Display Co., Ltd.

Inventor： Hyoungjoo Kim ,  Eunsu Jun ,  Seokhwan Kim ,  Hakmin Kim ,  Joongbae Pyoun ,  Ilyoung Jeong

IPC: B23K26/06 ,  B23K26/38

Abstract: A laser cutting apparatus may include a first fixing member rotatable with respect to a first rotation axis extending in a first direction, a first reflection mirror fixed to the first fixing member, a portion of the first reflection mirror being clamped by the first fixing member, the first reflection mirror being rotatable with respect to the first rotation axis together with the first fixing member and configured to reflect a laser light, and a first-1 filling member between the first fixing member and the portion of the first reflection mirror clamped by the first fixing member.