公开(公告)号：US10907245B2

公开(公告)日：2021-02-02

申请号：US16457722

申请日：2019-06-28

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu Seo ,  Sang-Jin Han ,  Cheol-Lae Roh ,  Jae-Hong Ahn

IPC: C23C14/24 ,  C23C14/26 ,  C23C16/448

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

公开(公告)号：US09515263B2

公开(公告)日：2016-12-06

申请号：US14456930

申请日：2014-08-11

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Choi ,  Hyun Choi ,  Sung-Gon Kim ,  Min-Gyu Seo

IPC: H01L51/00 ,  B05B13/04 ,  B05B15/04 ,  H01L51/56 ,  B05B1/14

CPC classification number: H01L51/0003 ,  B05B1/14 ,  B05B12/36 ,  B05B13/04 ,  H01L51/0004 ,  H01L51/56

Abstract: A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.

Abstract translation: 用于沉积有机材料的装置包括：基板; 具有开口部分和屏蔽部分的掩模; 用于将所述基板和所述掩模彼此固定的固定构件; 沉积源，包括沿第一方向布置并被配置为喷射有机材料的多个喷嘴; 以及在沉积源上的多个喷嘴附近的多个屏蔽板。 基板与从其中一个喷嘴的远端延伸到对应的一个屏蔽板的远端的中心的线之间的角度θ大于或等于屏蔽部分的屏蔽部分的锥角Φ 面具。

公开(公告)号：US10364488B2

公开(公告)日：2019-07-30

申请号：US15884236

申请日：2018-01-30

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu Seo ,  Sang-Jin Han ,  Cheol-Lae Roh ,  Jae-Hong Ahn

IPC: C23C14/24 ,  C23C14/26 ,  C23C16/448

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

公开(公告)号：US10081867B2

公开(公告)日：2018-09-25

申请号：US14484691

申请日：2014-09-12

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu Seo ,  Sang-Jin Han ,  Cheol-Lae Roh ,  Jae-Hong Ahn

IPC: C23C14/26 ,  C23C16/448 ,  C23C14/24

CPC classification number: C23C14/243 ,  C23C14/26 ,  C23C16/4485

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

公开(公告)号：US20140349433A1

公开(公告)日：2014-11-27

申请号：US14456930

申请日：2014-08-11

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Choi ,  Hyun Choi ,  Sung-Gon Kim ,  Min-Gyu Seo

IPC: H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0003 ,  B05B1/14 ,  B05B12/36 ,  B05B13/04 ,  H01L51/0004 ,  H01L51/56

Abstract: A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.

Abstract translation: 用于沉积有机材料的装置包括：基板; 具有开口部分和屏蔽部分的掩模; 用于将所述基板和所述掩模彼此固定的固定构件; 沉积源，包括沿第一方向布置并被配置为喷射有机材料的多个喷嘴; 以及在沉积源上的多个喷嘴附近的多个屏蔽板。 角度和角度 在基板与从一个喷嘴的远端延伸到对应的一个屏蔽板的远端的中心的线之间的距离大于或等于掩模的屏蔽部分的锥角Φ。